Semiconductor device and method of manufacturing the same
A method of manufacturing a semiconductor device includes: forming an insulating film above a semiconductor substrate; forming a conductive film on the insulating film; forming a dielectric film on the conductive film; forming a plurality of upper electrodes at intervals on the dielectric film; forming a first protective insulating film on the upper electrodes and the dielectric film by a sputtering method; forming a second protective insulating film on the first protective insulating film by an atomic layer deposition method, thereby filling gaps of a grain boundary of the dielectric film with the second protective insulating film; and patterning the conductive film after the second protective insulating film is formed to provide a lower electrode.
1. A semiconductor device comprising:
an insulating film formed above a semiconductor substrate;
a lower electrode formed on the insulating film;
a dielectric film formed on the lower electrode, the dielectric film including a ferroelectric and having gaps generated along a grain boundary of the dielectric film;
a plurality of upper electrodes formed at intervals on the dielectric film to form a ferroelectric capacitor together with the lower electrode and the dielectric film;
a first protective insulating film formed on portions of the dielectric film excluding the gaps, and on the upper electrodes; and
a second protective insulating film formed on the first protective insulating film and on the dielectric film in the gaps such that the gaps are filled with the second protective insulating film.
2. The semiconductor device according to claim 1 , further comprising:
a third protective insulating film formed on the second protective insulating film and on a side surface of the dielectric film.
3. The semiconductor device according to claim 1 , wherein the first protective insulating film is not formed at a lower portion of the gap.
4. The semiconductor device according to claim 1 , wherein the first protective insulating film is formed to overhang an opening end at an upper portion of the gap.
5. The semiconductor device according to claim 1 , wherein the second protective insulating film has a better step coverage property than a step coverage property of the first protective insulating film.
6. The semiconductor device according to claim 1 , wherein the dielectric film includes an upper side surfaces and a lower side surface;
the lower side surface contacts the lower electrode; and
the gaps are communicated from the upper side surface to the lower side surface.