Organic EL display device and method of manufacturing an organic EL display device
View Patent ↗An organic EL display device includes a thin film transistor substrate that has a circuit layer, a passivation layer, a lower electrode formed in each pixel in a display region, an organic material layer that is in contact with the lower electrode, an upper electrode that covers the organic material layer, and a sealing layer that entirely covers the base material. The thin film transistor substrate has the display region, and a moisture blocking region that surrounds the display region. On the moisture blocking region, the circuit layer, the passivation layer, the moisture blocking layer, and the sealing layer are laminated in this order. A composition of the moisture blocking layer is different from a composition of the sealing layer.
1. An organic EL display device, comprising:
a thin film transistor substrate including a circuit layer, a passivation layer, a lower electrode formed in each pixel in a display region, an organic material layer that is in contact with the lower electrode, an upper electrode that covers the organic material layer, and a sealing layer that entirely covers a base material, the sealing layer including a first inorganic layer and a second inorganic layer, wherein
the thin film transistor substrate has the display region, and a moisture blocking region that surrounds the display region,
on the moisture blocking region, the circuit layer, the passivation layer, a moisture blocking layer not provided in the display region, and the sealing layer are laminated in this order, and
a composition of an inorganic material forming the moisture blocking layer is different from a composition of an inorganic material forming the first and second inorganic layer of the sealing layer, and
the moisture blocking layer is in contact with the first inorganic layer, and the first inorganic layer is in contact with the second inorganic layer on the moisture blocking layer.
2. The organic EL display device according to claim 1 , wherein
an etching speed as to the moisture blocking layer is smaller than an etching speed as to the sealing layer.
3. The organic EL display device according to claim 1 , wherein
the sealing layer is formed of SiN, and
the moisture blocking layer is formed of SiO or SiON.
4. A manufacturing method of an organic EL display device, comprising:
forming a circuit layer on a base material of a thin film transistor substrate;
forming a passivation layer on the circuit layer,
forming a moisture blocking layer on the passivation layer in a moisture blocking region that surrounds a display region and that is not provided in the display region; and
forming a sealing layer so as to entirely cover the base material, the sealing layer including a first inorganic layer and a second inorganic layer, wherein
a composition of an inorganic material forming the moisture blocking layer is different from a composition of an inorganic material forming the first and second inorganic layers of the sealing layer,
the moisture blocking layer is in contact with the first inorganic layer, and the first inorganic layer is in contact with the second inorganic layer on the moisture blocking layer.