X-ray tube, X-ray tube device, and method of manufacturing X-ray tube device
According to one embodiment, an X-ray tube comprises a cathode for emitting electrons, an anode having an anode target with which electrons emitted from the cathode collides to radiate X-rays, a glass container housing the cathode and the anode, an anode rod extending from the anode to an outside of the container, an annular metal member through which the anode rod is inserted, the annular metal member connecting the anode and the container to maintain an inside of the container in vacuum, and an electrically insulating molding resin member charged into a space formed between the anode rod and outer surfaces of the container and the metal member.
1. An X-ray tube comprising:
a cathode for emitting electrons;
an anode having an anode target with which electrons emitted from the cathode collides to radiate X-rays;
a glass container housing the cathode and the anode;
an anode rod extending from the anode to an outside of the glass container;
an annular metal member through which the anode rod is inserted, the annular metal member connecting the anode and the glass container to maintain an inside of the glass container in vacuum; and
an electrically insulating molding resin member charged and cured in a space formed between the anode rod and outer surfaces of the glass container and the metal member, and comprising a surface exposed to outside air.
2. The X-ray tube of claim 1 , wherein a main component of the molding resin member is a silicone resin.
3. The X-ray tube of claim 1 wherein,
the glass container has a recessed portion recessed in a direction of the anode around the anode rod;
the recessed portion has an opening on the anode side; and
the metal member closes the opening.
4. The X-ray tube of claim 3 , wherein
the space is formed between the anode rod and the outer surfaces of the glass container and the metal member in the recessed portion, the space being annular, and
the molding resin member is filled into the annular space.
5. The X-ray tube of claim 3 , wherein the molding resin member is filled into the space and overflows the space, and extends on an outer surface of the glass container around the recessed portion.
6. An X-ray tube device comprising:
an X-ray tube including,
a cathode for emitting electrons,
an anode having an anode target with which electrons emitted from the cathode collides to radiate X-rays,
a glass container housing the cathode and the anode;
an anode rod extending from the anode to an outside of the glass container,
an annular metal member through which the anode rod is inserted, the annular metal member connecting the anode and the glass container to maintain an inside of the glass container in vacuum, and
an electrically insulating first molding resin member charged and cured in a space formed between the anode rod and outer surfaces of the glass container and the metal member; and
a fixing member attached to an end portion of the anode rod located outside the glass container and having a fixing surface forming a gap between the fixing member and the first molding resin member.
7. The X-ray tube device of claim 6 , further comprising an electrically insulating and thermosetting second molding resin member, which is different from the first molding resin member and covers the X-ray tube and fills the gap between the first molding resin member and the fixing surface.
8. The X-ray tube device of claim 7 , further comprising a housing which houses the X-ray tube and the fixing member,
wherein the second molding resin member is filled in the housing.
9. The X-ray tube device of claim 8 , further comprising a high voltage generator housed in the housing and supplying a high voltage to the X-ray tube,
wherein the second molding resin member covers the high voltage generator.
10. The X-ray tube device of claim 7 , wherein a main component of the first molding resin member is a silicone resin and a main component of the second molding resin member is a silicone resin.
11. The X-ray tube device of claim 10 , wherein the main component of the first molding resin member and the main component of the second molding resin member are the same thermosetting silicone resin.
12. The X-ray tube device of claim 6 , wherein
the glass container has a recessed portion recessed in a direction of the anode around the anode rod;
the recessed portion has an opening on the anode side; and
the metal member closes the opening.
13. The X-ray tube device of claim 12 , wherein
the space is formed between the anode rod and the outer surfaces of the glass container and the metal member in the recessed portion, the space being annular, and
the first molding resin member is filled in the annular space.
14. The X-ray tube device of claim 13 , wherein the first molding resin member is filled in the space and overflows the space, and extends on an outer surface of the glass container around the recessed portion.
15. A method of manufacturing an X-ray tube device including an X-ray tube, the X-ray tube including,
a cathode for emitting electrons,
an anode having an anode target with which electrons emitted from the cathode collides to radiate X-rays,
a glass container housing the cathode and the anode,
an anode rod extending from the anode to an outside of the glass container, and
an annular metal member through which the anode rod is inserted, the annular metal member connecting the anode and the glass container to maintain an inside of the glass container in vacuum,
the method comprising:
charging and curing an electrically insulating first molding resin member in a space formed between the anode rod and outer surfaces of the glass container and the metal member;
attaching an end of the anode rod located outside the glass container to the fixing surface so that a gap is formed between the fixing surface of the fixing member and the first molding resin member;
accommodating the X-ray tube in a housing; and
charging and curing an electrically insulating and thermosetting second molding resin member in the housing, covering the X-ray tube with the second molding resin member, and filling the gap between the first molding resin member and the fixing surface with the second molding resin member.
16. The method of manufacturing the X-ray tube device of claim 15 , wherein
the accommodating includes accommodating a high-voltage generator electrically connected to the X-ray tube in the housing together with the X-ray tube, and
the charging and curing includes charging and curing the second molding resin member in the housing, covering the X-ray tube and the high voltage generator with the second molding resin member, and filling the gap between the first molding resin member and the fixing surface with the second molding resin member.
17. The method of manufacturing the X-ray tube device of claim 15 , wherein a main component of the first molding resin member is a silicone resin and a main component of the second molding resin member is a silicone resin.
18. The method of manufacturing the X-ray tube device of claim 17 , wherein the main component of the first molding resin member and the main component of the second molding resin member are the same thermosetting silicone resin.