Display device
View Patent ↗The purpose of the present invention is to improve reliability of the TFT of the oxide semiconductor. The feature of the invention is: A display device comprising: a substrate including a display area where plural pixels are formed, the pixel includes a first TFT of a first oxide semiconductor, a first gate insulating film is formed under the first oxide semiconductor, a first gate electrode is formed under the first gate insulating film, an interlayer insulating film is formed on the first oxide semiconductor; a drain wiring, which connects with the first oxide semiconductor, and a source wiring, which connects with the first oxide semiconductor, are formed on the interlayer insulating film; the drain wiring or the source wiring is a laminated structure of a second oxide semiconductor and a first metal, the second oxide semiconductor is under the first metal.
1. A display device comprising:
a substrate including a display area where plural pixels are formed,
the plural pixels include a first TFT of a first oxide semiconductor,
a first gate insulating film is formed under the first oxide semiconductor,
a first gate electrode is formed under the first gate insulating film,
an interlayer insulating film is formed on the first oxide semiconductor,
a first through hole and a second through hole are formed across the interlayer insulating film in a direction facing the substrate and the plural pixels,
a drain wiring, which connects with the first oxide semiconductor through the first through hole, and a source wiring, which connects with the first oxide semiconductor through the second through hole, are formed on the interlayer insulating film,
the drain wiring or the source wiring is a laminated structure of a second oxide semiconductor and a first metal,
the second oxide semiconductor is under the first metal, and
the laminated structure of the drain wiring contacts a side wall of the first through hole,
the laminated structure of the source wiring contacts a side wall of the second through hole.
2. The display device according to claim 1 ,
wherein the interlayer insulating film is a laminated structure of a first silicon oxide film and a first aluminum oxide film,
the first silicon oxide film is under the first aluminum oxide film.
3. The display device according to claim 1 ,
wherein the interlayer insulating film is a laminated structure of a first silicon oxide film and a first silicon nitride film,
the first silicon oxide film is under the first silicon nitride film.
4. The display device according to claim 1 ,
wherein the first gate insulating film is a laminated structure of a second aluminum oxide film and a second silicon oxide film,
the second silicon oxide film is over the second aluminum oxide film.
5. The display device according to claim 1 ,
wherein the first gate electrode is a laminated structure of a second metal layer and a third oxide semiconductor,
the second metal layer is under the third oxide semiconductor.
6. The display device according to claim 1 ,
wherein the substrate includes a second TFT of a poly-silicon semiconductor,
a distance between the poly-silicon semiconductor d the substrate is less than a distance between the first oxide semiconductor and the substrate.
7. A display device comprising:
a substrate including a display area where plural pixels are formed,
the plural pixels include a first TFT of a first oxide semiconductor,
a first gate insulating film is formed on the first oxide semiconductor,
a first gate electrode is formed on the first gate insulating film,
an interlayer insulating film is formed on the first gate electrode,
a first through hole and a second through hole are formed across the interlayer insulating film in a direction facing the substrate and the plural pixels,
a drain wiring, which connects with the first oxide semiconductor through the first through hole, and a source wiring, which connects with the first oxide semiconductor through the second through hole, are formed on the interlayer insulating film,
the drain wiring or the source wiring is a laminated structure of a second oxide semiconductor and a first metal,
the second oxide semiconductor is under the first metal, and
the laminated structure of the drain wiring contacts a side wall of the first through hole,
the laminated structure of the source wiring contacts a side wall of the second through hole.
8. The display device according to claim 7 ,
a protective layer is formed between the first oxide semiconductor layer and the drain wiring, and between the first oxide semiconductor layer and the source wiring.
9. The display device according to claim 7 ,
wherein the interlayer insulating film is a laminated structure of a first silicon oxide film and a first aluminum oxide film,
the first silicon oxide film is under the first aluminum oxide film.
10. The display device according to claim 7 ,
wherein the interlayer insulating film is a laminated structure of a first silicon oxide film and a first silicon nitride film,
the first silicon oxide film is under the first silicon nitride film.
11. The display device according to claim 7 ,
wherein the first gate insulating film is a laminated structure of a second aluminum oxide film and a second silicon oxide film,
the second silicon oxide film is under the second aluminum oxide film.
12. The display device according to claim 7 ,
wherein the first gate electrode is a laminated structure of a second metal layer and a third oxide semiconductor,
the second metal layer is on the third oxide semiconductor.
13. The display device according to claim 7 ,
wherein the substrate includes a second TFT of a poly-silicon semiconductor,
a distance between the poly-silicon semiconductor d the substrate is less than a distance between the first oxide semiconductor and the substrate.
14. The display device according to claim 8 ,
wherein the substrate includes a second TFT of a poly-silicon semiconductor,
a distance between the poly-silicon semiconductor and the substrate is less than a distance between the first oxide semiconductor and the substrate.
15. The display device according to claim 7 ,
a second gate insulating film including a third silicon oxide film,
a second gate electrode is formed under the second gate insulating film,
the first oxide semiconductor film is formed on the third silicon oxide film.
16. The display device according to claim 15 ,
the second gate insulating film is a laminated turn of the third silicon oxide film and a third aluminum oxide film,
the second gate electrode contacts with the aluminum oxide film.
17. The display device according to claim 15 ,
the second gate electrode is formed by a laminated film of a second metal layer and a third oxide semiconductor film,
the third oxide semiconductor film is on the second metal layer.
18. The display device according to claim 8 ,
a second gate insulating film including a third silicon oxide film is formed under the first oxide semiconductor,
a second gate electrode is formed under the second gate insulating film,
the first oxide semiconductor is formed on the third silicon oxide film.
19. The display device according to claim 15 ,
wherein the substrate includes a second TFT of a poly-silicon semiconductor,
a distance between the poly-silicon semiconductor and the substrate is less than a distance between the second gate electrode and the substrate.
20. The display device according to claim 18 ,
wherein the substrate includes a second TFT of a poly-silicon semiconductor,
a distance between the poly-silicon semiconductor and the substrate is less than a distance between the second gate electrode and the substrate.