IP Library Granted Patent US 10,535,571
Granted Patent B1
US 10,535,571 · App. 15/903,586 · Granted Jan 14, 2020

Wafer-scale testing of photonic integrated circuits using horizontal spot-size converters

Inventors: Diedrik Vermeulen (Somerville, MA); Long Chen (Marlboro, NJ); Christopher Doerr (Middletown, NJ)
Assignee: Acacia Communications, Inc.
H01L22/10G01M11/30G01M11/37G02B6/1223G02B6/305H01L22/30G02B6/34G02B2006/12195
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Quick Facts
Patent No.
US 10,535,571
App. No.
15/903,586
Granted
Jan 14, 2020
Kind
B1
Abstract

Disclosed herein are methods, structures, and devices for wafer scale testing of photonic integrated circuits.

Claims (14)

1. An apparatus comprising:

a wafer comprising a plurality of photonic integrated circuits;

a first photonic integrated circuit of the plurality of photonic integrated circuits comprising a test circuit;

a second photonic integrated circuit of the plurality of photonic integrated circuits adjacent the first photonic integrated circuit and comprising a horizontal spot-size converter, wherein the horizontal spot-size converter comprises an inverted taper;

wherein the test circuit is configured to test the second photonic integrated circuit via the horizontal spot-size converter.

2. The apparatus of claim 1 ,

wherein the second photonic integrated circuit comprises an intermediate waveguide optically coupled to the inverted taper;

wherein the inverted taper and the intermediate waveguide are made of different materials.

3. The apparatus of claim 1 , wherein the test circuit comprises a grating coupler.

4. The apparatus of claim 1 , wherein the test circuit comprises a polarization splitter.

5. The apparatus of claim 1 , wherein the horizontal spot-size converter is a first horizontal spot-size converter, and wherein the first photonic integrated circuit further comprises a second horizontal spot-size converter configured to optically couple the test circuit to the first horizontal spot-size converter.

6. The apparatus of claim 1 , wherein the wafer comprises silicon.

7. The apparatus of claim 1 , wherein the test circuit is configured to optically couple to the horizontal spot-size converter through a trench.

8. The apparatus of claim 7 , wherein the horizontal spot-size converter forms an angle with respect to a normal to the trench that is greater than zero.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 19, 2024
From: ACACIA COMMUNICATIONS, INC.
To: ACACIA TECHNOLOGY, INC.
Reel/Frame 066832/0659 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 30, 2018
From: VERMEULEN, DIEDRIK; CHEN, LONG; DOERR, CHRISTOPHER
To: ACACIA COMMUNICATIONS, INC.
Reel/Frame 046751/0785 →
Continuity (2)
Continuation 14103659 · Dec 11, 2013
Provisional Application 61735702 · Dec 11, 2012