Compound semiconductor solar cell and method of manufacturing the same
A compound semiconductor solar cell and a method of manufacturing the same are disclosed. The compound semiconductor solar cell includes a compound semiconductor layer, a front electrode positioned on a front surface of the compound semiconductor layer, a back electrode positioned on a back surface of the compound semiconductor layer, a defect portion disposed within the compound semiconductor layer and physically and electrically connected to the back electrode, and an isolation portion surrounding the defect portion.
1. A method of manufacturing a compound semiconductor solar cell including a back electrode, a compound semiconductor layer, and a defect portion disposed within the compound semiconductor layer, the method comprising:
removing a portion of the compound semiconductor layer around the defect portion using a femtosecond laser to form an isolation portion enclosing the detect portion; and
forming a front electrode on the compound semiconductor layer after forming the isolation portion,
wherein when the isolation portion is formed, the isolation portion exposes a portion of the back electrode without removing the back electrode,
wherein the defect portion is formed of the same material as the back electrode, and is physically connected to the back electrode,
wherein the isolation portion includes a physical gap between the defect portion and the compound semiconductor layer,
wherein the front electrode is not be formed in a region where the defect portion and the isolation portion are positioned, and wherein the back electrode comprises a metal.
2. The method of claim 1 , wherein the femtosecond laser has a wavelength of 248 nm, 355 nm, or 532 nm, and a frequency of 100 kHz to 150 kHz.
3. The method of claim 1 , wherein the defect portion includes at least one selected from among gold (Au), platinum (Pt), titanium (Ti), tungsten (W), silicon (Si), nickel (Ni), magnesium (Mg), palladium (Pd), copper (Cu), and germanium (Ge).
4. The method of claim 1 , wherein the forming of the isolation portion includes removing the portion of the compound semiconductor layer around the defect portion so that the isolation portion is formed in at least one planar shape of a circular planar shape, an oval planar shape, and a polygonal planar shape, and the isolation portion has a linewidth of 1 μm or less.
5. The method of claim 4 , wherein when the femtosecond laser is irradiated, an inert gas is supplied to a laser irradiation region of the compound semiconductor layer.
6. The method of claim 5 , wherein the inert gas includes at least one of a nitrogen gas and an argon gas.