Substrate laminating apparatus, substrate laminating method, and stereoscopic display device
A substrate laminating apparatus, including a first vacuum chamber including a first opening; a first table provided inside the first opening for holding a first substrate; a second vacuum chamber including a second opening; a second table provided inside the second opening for holding a second substrate, wherein the substrates are laminated by reducing a pressure in a closed space formed by having the first opening faced with the second opening. The apparatus also includes a vacuum evacuation unit connected to the first vacuum chamber or the second vacuum chamber and performs reduced-pressure evacuation of the closed space. When there is a direction along which priority is given on lamination precision when laminating the first and second substrates, and the direction is defined as a lamination precision priority direction, a reduced-pressure evacuation direction done by the vacuum evacuation unit is a direction different from the lamination precision priority direction.
1. A substrate laminating apparatus, comprising:
a first vacuum chamber including a first opening;
a first table provided inside the first opening of the first vacuum chamber for holding a first substrate;
a second vacuum chamber including a second opening;
a second table provided inside the second opening of the second vacuum chamber for holding a second substrate, wherein the substrates are laminated by reducing a pressure in a closed space formed by having the first opening faced with the second opening, the substrate laminating apparatus further comprising:
a vacuum evacuation unit which is connected to the first vacuum chamber or the second vacuum chamber and performs reduced-pressure evacuation of the closed space, wherein:
when a substrate holding surface of the first table and the second table are defined as an XY-plane formed by an X-axis direction and a Y-axis direction orthogonal to each other and a direction orthogonal to the XY-plane is defined as a Z-axis direction, a moving direction of the first vacuum chamber is only the Y-axis direction, and a moving direction of the second vacuum chamber is only the Z-axis direction;
the first substrate is one out of an optical lenticular lens substrate and a display pane: the second substrate is the other one of the optical lenticular lens substrate and the display panel;
the lenticular lens substrate is held to the first table or the second table so that a direction in which a cylindrical lens constituting the lenticular lens substrate distributes light is consistent with the X-axis direction; and
a reduced-pressure evacuation direction done by the vacuum evacuation unit is the Z-axis direction.
2. The substrate laminating apparatus as claimed in claim 1 , wherein:
the first vacuum chamber is a vacuum chamber disposed on a lower side of the closed space; and
the second vacuum chamber is a vacuum chamber disposed on an upper side of the closed space.