Current detection device
Magnetic detectors and a lower insulating layer covering the magnetic detectors are disposed on a substrate. On the lower insulating layer, a coil layer including a plurality of segments forming a counter detector of a feedback coil is disposed. Height adjustment layers are disposed on both sides of the coil layer. The coil layer and the height adjustment layers are covered with an upper insulating layer, and a shield layer is disposed thereon. Accordingly, the shield layer can be made substantially flat.
1. A current detection device comprising:
a current path through which a current to be measured flows;
a coil layer having a planer helical pattern, the coil layer including a detector portion facing the current path, the detector portion including a plurality of segments which are part of the helical pattern;
a magnetic detector facing the current path via the detector portion of the coil layer;
a lower insulating layer provided between the magnetic detector and the coil layer so as to cover the magnetic detector;
a height adjustment layer made of a nonmagnetic metal, the height adjustment layer being provided on the lower insulating layer and disposed on both sides of the detector portion of the coil layer;
an upper insulating layer made of an inorganic material, the upper insulating layer disposed on the lower insulating layer so as to cover the coil layer and the height adjustment layer;
a shield layer disposed on the upper insulating layer below the current path over the detector portion of the coil layer and the height adjustment layer such that the shield layer covers the detector portion of the coil layer, the shield layer having side end portions located above the height adjustment layer;
a coil energization section configured to control a current to be applied to the coil layer in accordance with an increase or decrease in a detection output of the magnetic detector; and
a current detector coupled to the coil layer to detect an amount of current flowing in the coil layer.
2. The current detection device according to claim 1 , wherein the detector portion of the coil layer and the height adjustment layer have a same height with respect to the lower insulating layer.
3. The current detection device according to claim 1 , wherein the coil layer and the height adjustment layer are plated layers.
4. The current detection device according to claim 3 , wherein the coil layer and the height adjustment layer are made of a same conductive metallic material.
5. The current detection device according to claim 1 , wherein a length of the height adjustment layer in a first direction in which the current flows through the detector portion of the coil layer is greater than a length of the shield layer in the first direction.
6. The current detection device according to claim 1 , wherein a width of the height adjustment layer in a crossing direction that crosses a first direction in which the current flows though the detector portion of the coil layer is greater than a width of the detector portion of the coil layer in the crossing direction.
7. The current detection device according to claim 1 ,
wherein the shield layer extends in a first direction in which the current flows through the detector portion of the coil layer so as to have a length in the first direction greater than a width thereof perpendicular to the first direction, the shield layer having two sides extending in the first direction and two end portions,
and wherein the end portions have a curved shape in plan view protruding outwardly over the entire width of the shield layer.
8. The current detection device according to claim 7 , wherein the end portions have a substantially semicircular shape when in plan view.
9. The current detection device according to claim 7 , wherein a sensitivity-axis direction of the magnetic detector is perpendicular to the first direction.