Combination vacuum and over-pressure process chamber and methods related thereto
A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.
1. A process chamber system, said process chamber system comprising:
a process chamber, said process chamber comprising an opening with a chamber opening flange;
a low vacuum source coupled to said process chamber;
a pressurized gas source coupled to said process chamber;
a process chamber door, said process chamber door adapted to seal to said chamber opening flange along a sealing flange area;
a double seal along said sealing flange area, said double seal capturing a seal gap area between the two seals of said double seal between said door and said chamber opening flange; and
a high vacuum source coupled to said seal gap area,
wherein said seal gap is sized to allow for sealing of the process chamber door while the process chamber is at a pressure greater than atmospheric pressure and the seal gap area is under vacuum.
2. The process chamber system of claim 1 wherein said process chamber door is located on the bottom of said process chamber and is adapted to open and close through vertical motion.
3. The process chamber system of claim 2 further comprising a lift mechanism coupled to said process chamber door, said lift mechanism adapted to raise said process chamber door into engagement with said chamber opening flange.
4. The process chamber system of claim 3 wherein there are no mechanical latches or fasteners adapted to latch of fasten said process door to said process chamber.
5. The process chamber system of claim 4 wherein said double seal comprises and inner O-ring and an outer O-ring.
6. The process chamber system of claim 1 wherein there are no mechanical latches or fasteners adapted to latch or fasten said process door to said process chamber.
7. The process chamber system of claim 1 wherein said double seal comprises and inner O-ring and an outer O-ring.
8. A method for processing in a process chamber, said method comprising the steps of:
loading substrates into a process chamber through a chamber door opening;
closing the chamber door;
creating a seal between the chamber door and the process chamber by pulling a vacuum between two seals which create said door seal;
running a process step in the process chamber while said process chamber is under vacuum;
and
running a process step in the process chamber at a pressure greater than atmospheric pressure.
9. The method of claim 8 wherein said step of closing the chamber door comprises the step of lifting the door up to mate with a downward facing chamber door opening.
10. The method of claim 9 wherein the step of lifting the door up comprises lifting the door up with a door lift mechanism with a known maximum lift capacity.
11. The method of claim 8 wherein said chamber door and said chamber are not held closed with a mechanical latch or fasteners other than the door lift mechanism and the force of vacuum between the two seals which create the door seal.