Display device and manufacturing method thereof
A display device according to an embodiment of the present invention includes: an electrode; a light-emitting layer formed on the electrode; and a metal-containing film formed on the light-emitting layer and containing a first metallic element. The metal-containing film includes a metal layer forming an interface of the metal-containing film on the side of the light-emitting layer, formed of a simple substance of the first metallic element or an alloy of the first metallic element and a second metallic element, and a light-transmitting oxide layer forming an interface of the metal-containing film on the opposite side from the interface on the side of the light-emitting layer, formed of an oxide of the first metallic element, and having a light-transmitting property.
1. A display device comprising:
an electrode;
a light-emitting layer formed on the electrode; and
a Mg-containing film formed on the light-emitting layer and containing magnesium (Mg), wherein
the Mg-containing film includes
a first metal layer forming an interface of the Mg-containing film on the side of the light-emitting layer and formed of a magnesium-silver alloy (MgAg),
a second metal layer on the first metal layer, formed of magnesium (Mg),
a third metal layer between the first metal layer and the second metal layer, the third metal layer formed of a magnesium-silver alloy (MgAg), and
a light-transmitting oxide layer on the second metal layer, the light transmitting oxide layer forming an interface of the Mg-containing film on the opposite side from the interface on the side of the light-emitting layer and formed of magnesium oxide (MgO), wherein
a concentration of magnesium (Mg) in the third metal layer is higher than a concentration of magnesium (Mg) in the first metal layer.
2. The display device according to claim 1 , further comprising a sealing film formed on the Mg-containing film and formed of an inorganic insulating material.
3. The display device according to claim 1 , wherein
a concentration of silver (Ag) in the first metal layer is higher than a concentration of silver (Ag) in the third metal layer.
4. The display device according to claim 1 , wherein
a concentration of silver (Ag) continuously changes between the first metal layer and the third metal layer.
5. A manufacturing method of a display device, comprising:
forming, on a light-emitting layer, a Mg-containing film containing magnesium (Mg), the Mg-containing film including a metal layer forming an interface of the Mg-containing film on the side of the light-emitting layer and formed of a magnesium-silver alloy (MgAg), and a Mg simple-substance layer forming an interface of the Mg-containing film on the opposite side from the interface on the side of the light-emitting layer and formed of magnesium (Mg); and
oxidizing a part of the Mg simple-substance layer and remaining another part of the Mg simple-substance layer, wherein
the another part of the Mg simple-substance layer is between the magnesium-silver alloy (MgAg) and oxidized Mg (MgO).
6. The manufacturing method of a display device according to claim 5 , wherein
the forming of the Mg-containing film includes forming the metal layer by supplying magnesium (Mg) and silver (Ag), and thereafter forming the Mg simple-substance layer by continuing the supply of magnesium (MG) and stopping the supply of silver (Ag).
7. The manufacturing method of a display device according to claim 6 , wherein
the forming of the Mg simple-substance layer includes continuing the supply of magnesium (Mg), and gradually reducing and then stopping the supply of silver (Ag).
8. The manufacturing method of a display device according to claim 5 , wherein
the oxidizing of the interface of the Mg-containing film on the opposite side includes applying an oxygen plasma treatment to the interface of the Mg-containing film on the opposite side.
9. The manufacturing method of a display device according to claim 5 , further comprising,
after oxidizing the interface of the Mg-containing film on the opposite side, forming, on the Mg-containing film, a sealing film formed of an inorganic insulating material.
10. The manufacturing method of a display device according to claim 5 , wherein
in the Mg-containing film, a concentration of silver (Ag) on the side of the interface with the metal layer is higher than a concentration of silver (Ag) on the side of the interface with the Mg simple-substance layer.
11. The manufacturing method of a display device according to claim 5 , wherein
in the Mg-containing film, a concentration of silver (Ag) continuously changes between the side of the interface with the metal layer and the side of the interface with the Mg simple-substance layer.