IP Library Granted Patent US 10,381,397
Granted Patent B2
US 10,381,397 · App. 15/926,748 · Granted Aug 13, 2019

Nano metallic planar apex optical detector

Inventors: Zhaowei Xin (Wuhan, CN); Dong Wei (Wuhan, CN)
Assignee: Black Sesame International Holding Limited
H01L27/14669H01L31/0232H04N5/33H01L27/14627H01L31/02327H01L33/58
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Quick Facts
Patent No.
US 10,381,397
App. No.
15/926,748
Granted
Aug 13, 2019
Kind
B2
Abstract

A nano-metallic-planar-apex optical detector, comprising a semiconductor optical detector and a nano array mask defining a plurality of polygonal apertures connected to the optical detector, wherein the semiconductor optical detector detects near-field light focused b the nano array.

Claims (26)

1. A nano-metallic-planar-apex optical detector, comprising:

a semiconductor optical detector; and

a nano array mask defining a plurality of polygonal apertures connected to the optical detector,

wherein the semiconductor optical detector detects near-field light focused by the nano array; and

wherein the nano array mask comprises a cadmium adhesion layer and a gold layer.

2. Wherein the nano-metallic-planar-apex optical detector of claim 1 wherein the nano array mask defining at least one box aperture having at least one isosceles triangular insert remaining along at least one edge of an inside of the at least one box aperture.

3. Wherein the nano-metallic-planar-apex optical detector of claim 1 wherein the nano array mask defining at least one isotoxal square star aperture.

4. Wherein the nano-metallic-planar-apex optical detector of claim 1 wherein the nano array mask defining at least one box aperture having at least one rhombus insert remaining within the at least one box aperture.

5. Wherein the nano-metallic-planar-apex optical detector of claim 1 wherein the nano array mask defining at least one box aperture having a plurality of rhombus inserts remaining within the at least one box aperture.

6. Wherein the nano-metallic-planar-apex optical detector of claim 1 wherein the nano array mask defining at least one box aperture having at least one bow tie aperture along at least one inside edge of the at least one box aperture.

7. Wherein the nano-metallic-planar-apex optical detector of claim 1 wherein the nano array mask defining at least one box aperture having a plurality of bow tie apertures along at least one inside edge of the at least one box aperture.

8. Wherein the nano-metallic-planar-apex optical detector of claim wherein the nano array mask defining at least one box aperture haying a plurality of isosceles triangular inserts remaining along at least one inside edge of the at least one box aperture.

9. Wherein the nano-metallic-planar-apex optical detector of claim 1 wherein the nano array mask defining at least one box aperture having triangular metal remaining along at least one inside edge of the at least one box aperture.

10. A nano-metallic-planar-apex optical detector, comprising:

a nano array mask defining a plurality of polygonal apertures that form a plurality of Schottky contact electrodes;

a semiconductor optical detector, having a semiconductor optical detector first side connected to the plurality of Schottky contact electrodes wherein the semiconductor optical detector detects near-field light focused by the array, the semiconductor optical detector having a semiconductor optical detector second side opposite the semiconductor optical detector first side; and

a plurality of ohmic contact electrodes aligned with the nano array and connected to the semiconductor optical detector second side.

11. Wherein the nano-metallic-planar-apex optical detector of claim 10 wherein the nano array mask defining at least one box aperture having at least one isosceles triangular insert remaining along at least one inside edge of the at least one box aperture.

12. Wherein the nano-metallic-planar-apex optical detector of claim 10 wherein the nano array mask defining at least one isotoxal square star aperture.

13. Wherein the nano-metallic-planar-apex optical detector of claim 10 wherein the nano array mask defining at least one box aperture having at least one rhombus insert remaining within the at least one box aperture.

14. Wherein the nano-metallic-planar-apex optical detector of claim 10 wherein the nano array mask defining at least one box aperture having a plurality of rhombus inserts remaining within the at least one box aperture.

15. Wherein the nano-metallic-planar-apex optical detector of claim 10 wherein the nano array mask defining at least one box aperture having at least one bow tie aperture along at least one of inside edge of the at least one box aperture.

16. Wherein the nano-metallic-planar-apex optical detector of claim 10 wherein the nano array mask defining at least one box aperture having a plurality of bow tie apertures along at least one inside edge of the at least one box aperture.

17. Wherein the nano-metallic-planar-apex optical detector of claim 10 wherein the nano array mask defining at least one box aperture having a plurality of isosceles triangular inserts remaining along at least inside edge of the at least one box aperture.

18. Wherein the nano-metallic-planar-apex optical detector of claim 10 wherein the nano array mask defining at least one box aperture having triangular metal remaining along at least one inside edge of the at least one box aperture.

19. Wherein the nano-metallic-planar-apex optical detector of claim 10 wherein the nano array mask comprises a cadmium adhesion layer and a gold layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 3, 2021
From: BLACK SESAME INTERNATIONAL HOLDING LIMITED
To: BLACK SESAME TECHNOLOGIES INC.
Reel/Frame 058301/0364 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 1, 2019
From: BLACK SESAME TECHNOLOGIES INC.
To: BLACK SESAME INTERNATIONAL HOLDING LIMITED
Reel/Frame 049645/0323 →
Continuity (2)
Provisional Application 62586011 · Nov 14, 2017
Related Publication 20190148452A1 · May 16, 2019