Optical cladding layer design
Embodiments of the invention describe apparatuses, optical systems, and methods related to utilizing optical cladding layers. According to one embodiment, a hybrid optical device includes a silicon semiconductor layer and a III-V semiconductor layer having an overlapping region, wherein a majority of a field of an optical mode in the overlapping region is to be contained in the III-V semiconductor layer. A cladding region between the silicon semiconductor layer and the III-V semiconductor layer has a spatial property to substantially confine the optical mode to the III-V semiconductor layer and enable heat dissipation through the silicon semiconductor layer.
1. An apparatus, comprising:
a cladding layer defining a longitudinal direction transverse to a first surface of the cladding layer and a lateral direction parallel to the cladding layer, the cladding layer having a first thickness in a first lateral region and a second thickness in a second lateral region, the second thickness being greater than the first thickness;
a silicon semiconductor layer positioned on a second surface of the cladding layer opposite the first surface of the cladding layer; and
a buried oxide layer positioned on the silicon semiconductor layer, wherein the buried oxide layer includes a hole, at least a portion of the hole being longitudinally aligned with at least a portion of the second lateral region.
2. The apparatus of claim 1 , further comprising a thermally conductive material positioned in the hole, the thermally conductive material having a thermal conductivity greater than a thermal conductivity of the buried oxide layer.
3. The apparatus of claim 2 , wherein:
the silicon semiconductor layer has a third thickness in a third lateral region, at least a portion of the third lateral region positioned longitudinally adjacent to at least a portion of the first lateral region;
the buried oxide layer has a fourth thickness in a fourth lateral region, the fourth lateral region being longitudinally adjacent to at least a portion of the third lateral region; and
the thermally conductive material has a fifth thickness in the hole, the fifth thickness being greater than the fourth thickness.
4. The apparatus of claim 3 , further comprising a substrate positioned on the buried oxide layer, the hole extending through the substrate.
5. The apparatus of claim 3 ,
wherein the silicon semiconductor layer has a sixth thickness in a sixth lateral region, the sixth thickness being greater than the third thickness, the sixth lateral region being longitudinally adjacent to at least a portion of the second lateral region;
wherein the hole extends to the silicon semiconductor layer; and
wherein the thermally conductive material in the hole extends to at least the sixth lateral region.
6. The apparatus of claim 5 , wherein a sum of the second and sixth thicknesses equals a sum of the first and third thicknesses.
7. The apparatus of claim 3 ,
wherein the hole extends through the silicon semiconductor layer to the cladding layer; and
wherein the thermally conductive material in the hole extends to at least the second lateral region.
8. The apparatus of claim 3 , further comprising:
a III-V semiconductor layer positioned on the first surface the cladding layer, the III-V semiconductor layer having a seventh thickness in a seventh lateral region, at least a portion of the seventh lateral region positioned longitudinally adjacent to the first lateral region, the III-V semiconductor layer having an eighth thickness in an eighth lateral region, the eighth lateral region positioned longitudinally adjacent to at least a portion of the second lateral region, the eighth thickness being greater than the seventh thickness.
9. The apparatus of claim 8 , wherein the III-V semiconductor layer extends laterally beyond the second lateral region.
10. The apparatus of claim 8 , wherein the first, second, third, sixth, seventh, and eighth lateral regions are shaped to form a waveguide for at least a first wavelength of light.
11. The apparatus of claim 10 , wherein the first, second, third, and sixth lateral regions are shaped to form a thermal shunt of silicon extending into the cladding layer.
12. The apparatus of claim 11 , wherein the thermal shunt has dimensions smaller than the first wavelength of light in the silicon semiconductor layer.
13. The apparatus of claim 10 , wherein the first, second; third, and sixth lateral regions are shaped to form a plurality of thermal shunts of silicon extending into the cladding layer.
14. The apparatus of claim 13 , wherein each thermal shunt has dimensions smaller than the first wavelength of light in the silicon semiconductor layer.
15. The apparatus of claim 1 , wherein the cladding layer includes a dielectric material and has a thermal conductivity less than a thermal conductivity of silicon.
16. An apparatus, comprising:
a cladding layer defining a longitudinal direction transverse to a first surface of the cladding layer and a lateral direction parallel to the cladding layer, the cladding layer having a first lateral region;
a silicon semiconductor layer positioned on a second surface of the cladding layer opposite the first surface of the cladding layer, the silicon semiconductor layer having a third lateral region positioned longitudinally adjacent to the first lateral region, the silicon semiconductor layer having a sixth lateral region positioned longitudinally adjacent to at least a portion of the second lateral region;
a buried oxide layer positioned on the silicon semiconductor layer, the buried oxide layer having a fourth lateral region positioned longitudinally adjacent to at least a portion of the third lateral region, the buried oxide layer including a hole, at least a portion of the hole being longitudinally aligned with at least a portion of the sixth lateral region; and
a thermally conductive material positioned in the hole and extending to at least the sixth lateral region, the thermally conductive material having a thermal conductivity greater than a thermal conductivity of the buried oxide layer.
17. The apparatus of claim 16 , further comprising a substrate positioned on the buried oxide layer, the hole extending through the substrate.
18. The apparatus of claim 16 , wherein the cladding layer has a first thickness in the first lateral region and a second thickness in the second lateral region, the second thickness being greater than the first thickness.
19. An apparatus, comprising:
a cladding layer defining a longitudinal direction transverse to a first surface of the cladding layer and a lateral direction parallel to the cladding layer, the cladding layer having a first lateral region and a second lateral region;
a silicon semiconductor layer positioned on a second surface of the cladding layer opposite the first surface of the cladding layer, the silicon semiconductor layer having a third lateral region positioned longitudinally adjacent to at least a portion of the first lateral region;
a buried oxide layer positioned on the silicon semiconductor layer, the buried oxide layer having a fourth lateral region positioned longitudinally adjacent to at least a portion of the third lateral region, the buried oxide layer and the silicon semiconductor layer defining a hole through the buried oxide layer and the silicon semiconductor layer, at least a portion of the hole being longitudinally aligned with at least a portion of the second lateral region; and
a thermally conductive material positioned in the hole and extending to at least the second lateral region, the thermally conductive material having a thermal conductivity greater than a thermal conductivity of the buried oxide layer.
20. The apparatus of claim 19 , further comprising a substrate positioned on the buried oxide layer, the hole extending through the substrate.