Adhesive silicon oxynitride film
The invention relates generally to use of a silicon oxynitride film which exhibits desirable physical and chemical properties; superiority in adhesion to metals including noble metals and other metals, transparent conductive oxides, and semiconductor materials compared to silicon dioxide and silicon nitride; is wet-etchable, dry-etchable, or both; and operates as a high-performance overcoat barrier dielectric. The silicon oxynitride film meets performance requirements via a process that does not require an adhesion layer for deposition, and does not contaminate, obscure, or damage the device through incorporation or processing of additional adhesion layers.
1. A micro-electromechanical device or a microfabricated device comprising:
(i) a substrate comprising silicon, glass, fused silica, ceramic, or polymer;
(ii) a metal or a transparent electrically conductive oxide selected from indium tin oxide, fluorine-doped tin oxide, or doped zinc oxide, deposited on the substrate; and
(iii) a silicon oxynitride film deposited on the metal or the transparent conductive oxide, and having adhesion and wet-etchable properties,
wherein the silicon oxynitride film is adhesive to the metal or the transparent electrically conductive oxide without requiring an adhesion layer or an intermediate layer; and
wherein the silicon oxynitride film has an opening formed therethrough by an etchant during wet etching to define and expose an electrode surface, the silicon oxynitride film remaining adhesive to the metal or the transparent electrically conductive oxide during wet etching of the opening, and the opening and the electrode surface being free of damage and contaminants as compared to a film subjected to plasma etching.
2. The micro-electromechanical device or the microfabricated device of claim 1 , wherein the substrate comprises glass, and the metal comprises gold.
3. The micro-electromechanical device or the microfabricated device of claim 1 , wherein the substrate comprises silicon, and the metal comprises platinum.