Elastic wave device
An elastic wave device that utilizes a longitudinal wave leaky elastic wave includes a first medium layer, a second medium layer stacked on the first medium layer either directly or indirectly and that is a silicon oxide layer, a piezoelectric film stacked on the second medium layer either directly or indirectly, and an IDT electrode disposed on the piezoelectric film either directly or indirectly. In the elastic wave device, ρ1×C 11 , which is a product of a density ρ1 (kg/m 3 ) of the first medium layer and an elastic constant C 11 of the first medium layer, is larger than ρ0×C 11 , which is a product of a density ρ0 (kg/m 3 ) of the piezoelectric film and an elastic constant C 11 of the piezoelectric film.
1. An elastic wave device comprising:
a first medium layer;
a second medium layer that is stacked on the first medium layer either directly or indirectly and that is a silicon oxide layer;
a piezoelectric film directly or indirectly stacked on the second medium layer; and
an IDT electrode directly or indirectly disposed on the piezoelectric film; wherein
the elastic wave device utilizes a longitudinal wave leaky elastic wave;
the piezoelectric film has Euler angles of (about 90°, about 90°, ψ), where ψ is in a range of about 10° or more to about 60° or less; and
ρ1×C 11 , which is a product of a density ρ1 (kg/m 3 ) of the first medium layer and an elastic constant C 11 of the first medium layer, is larger than ρ0×C 11 , which is a product of a density ρ0 (kg/m 3 ) of the piezoelectric film and an elastic constant C 11 of the piezoelectric film.
2. The elastic wave device according to claim 1 , wherein a total thickness of the piezoelectric film and the second medium layer is about 1.0λ or less where λ represents a wavelength determined by a pitch of electrode fingers of the IDT electrode.
3. The elastic wave device according to claim 1 , further comprising:
a second silicon oxide layer disposed on the piezoelectric film and covering the IDT electrode.
4. The elastic wave device according to claim 3 , wherein the second silicon oxide layer has a thickness of about 0.05λ or less, where λ represents a wavelength determined by a pitch of electrode fingers of the IDT electrode.
5. The elastic wave device according to claim 1 , wherein the IDT electrode is made of one metal selected from the group consisting of Al, Cu, and Mo or an alloy that primarily includes the one metal.
6. The elastic wave device according to claim 1 , further comprising:
a support substrate stacked directly or indirectly on a surface of the first medium layer opposite to a surface of the first medium layer on which the second medium layer is stacked.
7. The elastic wave device according to claim 6 , wherein the support substrate is made of one of silicon, aluminum oxide, sapphire, silicon carbide, spinel, glass, or quartz crystal.
8. The elastic wave device according to claim 1 , wherein the elastic wave device is a one-port elastic wave resonator.
9. The elastic wave device according to claim 1 , wherein the first medium layer is made of Ru and has a thickness of about 0.2λ.
10. The elastic wave device according to claim 1 , wherein the piezoelectric film is made of LiNbO 3 .
11. The elastic wave device according to claim 10 , wherein the LiNbO 3 has Euler angles of (about 90°, about 90°, about 40°).
12. The elastic wave device according to claim 1 , wherein the silicon oxide layer is made of SiO 2 and has a thickness of about 0.3λ.
13. The elastic wave device according to claim 1 , wherein the IDT electrode is made of Al and has a thickness of about 0.05λ.
14. The elastic wave device according to claim 1 , wherein the first medium layer is made of BN and has a thickness of about 0.15λ.
15. The elastic wave device according to claim 1 , wherein the first medium layer is made of SiAlON and has a thickness of about 0.15λ.
16. The elastic wave device according to claim 1 , wherein the first medium layer is made of Zr and has a thickness of about 0.12λ.
17. The elastic wave device according to claim 1 , wherein a plurality of the first medium layers and a plurality of the second medium layers are alternately stacked.