Thermo-compression bonding tool with high temperature elastic element
View Patent ↗A thermo-compression bonding tool with a high temperature elastic element, and methods of bonding a metal sheet to a substrate using a thermo-compression bonding tool are described. In an example, a system for bonding a metal sheet to a substrate includes a stage to support the substrate and an elastic roller located above the stage. The elastic roller includes a high temperature material. The system also includes a heated backing plate located above the elastic roller. The backing plate is configured to apply pressure and heat to the elastic roller as the elastic roller rolls across a metal sheet disposed above the substrate.
1. A system for bonding a metal layer to a substrate, the system comprising:
a stage to support the substrate;
an elastic roller located above the stage; and
a pivotable backing plate located above the elastic roller;
wherein the pivotable backing plate is configured to apply pressure to the elastic roller and pivot about a line substantially perpendicular to the elastic roller as the elastic roller rolls across the metal layer disposed above the substrate.
2. The system of claim 1 , wherein the elastic roller comprises a high temperature material, and wherein the pivotable backing plate comprises one or more heating elements configured to heat the heated backing plate to a temperature in a range of 300 to 550 degrees C.
3. The system of claim 1 , wherein the elastic roller comprises a hollow metal roller.
4. The system of claim 3 , wherein the hollow metal roller comprises a thin-walled stainless steel roller.
5. The system of claim 2 , wherein the elastic roller comprises a metal tube configured to contain an inert gas inside the metal tube.
6. A system for bonding a metal layer to a substrate, the system comprising:
a stage to support the substrate;
an elastic roller located above the stage; and
a pivotable backing plate located above the elastic roller;
wherein the pivotable backing plate is configured to apply pressure to the elastic roller and pivot about a line substantially perpendicular to the elastic roller as the elastic roller rolls across the metal layer disposed above the substrate, wherein the elastic roller comprises a high temperature material, and wherein the pivotable backing plate comprises one or more heating elements configured to heat the heated backing plate to a temperature in a range of 300 to 550° C., and wherein the elastic roller comprises a hollow metal roller.
7. The system of claim 6 , wherein the hollow metal roller comprises a thin-walled stainless steel roller.
8. The system of claim 6 , wherein the elastic roller comprises a metal tube configured to contain an inert gas inside the metal tube.
9. The system of claim 6 , wherein the hollow metal roller comprises a thin-walled stainless steel roller, and wherein the elastic roller comprises a metal tube configured to contain an inert gas inside the metal tube.