IP Library Granted Patent US 10,586,925
Granted Patent B2
US 10,586,925 · App. 15/953,973 · Granted Mar 10, 2020

Release film, display device manufacturing method, and device

Inventors: Takumi Usukura (Kawasaki, JP); Mamoru Okamoto (Kawasaki, JP)
Assignee: TIANMA MICROELECTRONICS CO., LTD.
H01L51/003H01L51/5253H01L51/56H01L27/3244H01L2227/323H01L2227/326H01L2251/5338H01L2251/566
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Quick Facts
Patent No.
US 10,586,925
App. No.
15/953,973
Granted
Mar 10, 2020
Kind
B2
Abstract

Provided is a release film to be in contact with a surface of a base member and a surface of an object between the surface of the base member and the surface of the object. The release film includes a crystalline layer and a debond layer in contact with the crystalline layer. The debond layer has pores and includes an amorphous substance soluble in a solvent.

Claims (35)

1. A release film to be in contact with a surface of a base member and a surface of an object between the surface of the base member and the surface of the object, the release film comprising:

a crystalline layer; and

a debond layer in contact with the crystalline layer,

wherein the debond layer has pores and includes an amorphous substance soluble in a solvent.

2. The release film according to claim 1 , wherein the debond layer is formed on the surface of the base member.

3. The release film according to claim 1 ,

wherein a material of the release film is a metal oxide, and

wherein the amorphous substance in the debond layer has the pores.

4. The release film according to claim 3 ,

wherein the release film includes the crystalline layer between the debond layer and the surface of the object, and

wherein a porosity of the debond layer is higher than a porosity of the crystalline layer.

5. The release film according to claim 4 ,

wherein the material of the release film is molybdenum oxide, and

wherein the solvent is water.

6. The release film according to claim 1 , wherein a dissolving rate of the debond layer in a plane parallel to the surface of the base member is higher than dissolving rates in any plane outside of the debond layer and parallel to the surface of the base member.

7. The release film according to claim 1 , wherein the base member is a glass substrate and the object is a display panel.

8. A display device manufacturing method, comprising:

forming a release film on a surface of a substrate in such a manner that the release film is in contact with an entire interface with the surface of the substrate, the release film having pores and including an amorphous substance;

forming a display panel on the release film; and

separating the display panel from the substrate by dissolving the release film into a solvent.

9. The display device manufacturing method according to claim 8 , wherein the forming the release film includes:

depositing an amorphous metal oxide as a material of the release film onto the surface of the substrate; and

annealing the metal oxide deposited on the surface of the substrate to crystalize a part of the metal oxide and form a layer having pores and including an amorphous substance.

10. The display device manufacturing method according to claim 9 ,

wherein the material of the release film is molybdenum oxide, and

wherein the solvent is water.

11. The display device manufacturing method according to claim 8 , wherein the dissolving the release film includes hitting an end surface of the release film placed in a gas with the solvent ejected from a nozzle.

12. A device comprising:

a substrate;

a display panel; and

a release film formed to be in contact with a surface of the substrate and a surface of the display panel between the surface of the substrate and the surface of the display panel and to be dissolved when the display panel is separated from the substrate,

wherein the release film has pores and includes an amorphous substance soluble in a solvent.

13. The device according to claim 12 ,

wherein the display panel includes an elastic film holding light emitting elements between a first barrier film and a second barrier film that are capable of blocking moisture penetration, and

wherein the elastic film has a first surface in contact with the first barrier film and a second surface opposite to the first surface and in contact with the second barrier film and the first surface has a larger area than the second surface.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 17, 2019
From: TIANMA JAPAN, LTD.
To: TIANMA MICROELECTRONICS CO., LTD.
Reel/Frame 050395/0931 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 16, 2018
From: USUKURA, TAKUMI; OKAMOTO, MAMORU
To: TIANMA JAPAN, LTD.
Reel/Frame 045553/0446 →
Priority Claims (2)
JP 2017-081287 · Apr 17, 2017 · national
JP 2018-001151 · Jan 9, 2018 · national
Continuity (1)
Related Publication 20180301628A1 · Oct 18, 2018
Cited By (1)
US 12,376,481