Thermal airflow measuring device
In order to provide a flow measuring device high in thermal responsiveness, the flow measuring device includes a temperature detecting element 2 for temperature detection, and a conductive metal lead frame 3 that supports and fixes the temperature detecting element. Of the metal lead frame, a part of the metal lead frame mounted with the temperature detecting element has a portion which is thinner than the thickness of the other metal lead frame or narrower than the width of the other metal lead frame.
1. A sensor chip package, comprising:
a temperature detecting element;
a first conductive lead frame extending between the temperature detecting element and a thermal isolating structure portion of the device;
a second conductive lead frame electrically interconnected with but physically separated by the thermal isolating structure portion from the first conductive lead frame;
a circuit chip electrically connected to the temperature detecting element and to outer leads, the temperature detecting element, the first conductive lead frame, the second conductive lead frame, the thermal isolating portion, and the circuit chip being sealed by a thermosetting resin; and
a physical quantity sensor element electrically connected to the circuit chip,
wherein the temperature detecting element is in contact with the first conductive lead frame, the thermal isolating structure portion is defined by thin wire having heat capacity below that of the first conductive lead frame, and the thin wire has smaller cross-sectional area than the first lead frame and the second lead frame.
2. The sensor chip package of claim 1 , wherein the temperature detecting element is a thermistor chip.
3. The sensor chip package of claim 1 , wherein the thin wire is a wire-bonding.
4. The sensor chip package of claim 2 , wherein the thermistor chip is attached to at least the first conductive lead frame by a conductive adhesive.
5. The sensor chip package of claim 1 , wherein the physical quantity sensor element is a flow rate sensor chip.
6. The sensor chip package of claim 5 , wherein the outer leads include at least one exposed outer lead.
7. The sensor chip package of claim 6 , wherein the flow rate sensor chip is sealed by the thermosetting resin so that the detection part of the sensor chip is exposed.
8. The sensor chip package of claim 7 , wherein the second conductive lead flame is electrically connected with the circuit chip by a second thin wire and the second thin wire is also sealed by the thermosetting resin.