Methods for depositing films with organoaminodisilane precursors
View Patent ↗Described herein are precursors and methods for forming silicon-containing films. In one aspect, there is provided a precursor of Formula I: wherein R 1 is selected from linear or branched C 3 to C 10 alkyl group, linear or branched C 3 to C 10 alkenyl group, linear or branched C 3 to C 10 alkynyl group, C 1 to C 6 dialkylamino group, electron withdrawing group, and C 6 to C 10 aryl group; R 2 is selected from hydrogen, linear or branched C 1 to C 10 alkyl group, linear or branched C 3 to C 6 alkenyl group, linear or branched C 3 to C 6 alkynyl group, C 1 to C 6 dialkylamino group, C 6 to C 10 aryl group, linear or branched C 1 to C 6 fluorinated alkyl group, electron withdrawing group, and C 4 to C 10 aryl group; optionally wherein R 1 and R 2 are linked together to form ring selected from substituted or unsubstituted aromatic ring or substituted or unsubstituted aliphatic ring; and n=1 or 2.
1. A composition comprising greater than 99.5% by weight pure organoaminodisilane wherein the organoaminodisilane is made by a process comprising reacting disilane with a secondary amine with Formula II:
in the presence of a catalyst, wherein R 1 and R 2 are each independently selected from the group consisting of isopropyl, isobutyl, sec-butyl, tert-butyl, pentyl, iso-pentyl, tert-pentyl, hexyl, iso-hexyl, and neo-hexyl, provided that both R 1 and R 2 are not di-iso-propyl, or R 1 and R 2 may be linked to form a ring.
2. The composition of claim 1 wherein R 1 and R 2 are linked to form a ring selected from the group consisting of
a. pyrrolidino wherein R 1 =propyl and R 2 =Me,
b. piperidino wherein R 1 =propyl and R 2 =Et,
c. 2,6-dimethylpiperidino wherein R 1 =iso-propyl and R 2 =sec-butyl, and
d. 2,5-dimethylpyrrolidino wherein R 1 =R 2 =iso-propyl.
3. The composition of claim 2 wherein R 1 and R 2 are linked to form a pyrrolidino moiety.
4. The composition of claim 2 wherein R 1 and R 2 are linked to form a piperidino moiety.
5. The composition of claim 2 wherein R 1 and R 2 are linked to form a 2, 6-dimethylpiperidino moiety.
6. The composition of claim 2 wherein R 1 and R 2 are linked to form a 2, 5-dimethylpyrrolidino moiety.
7. The composition of claim 1 wherein at least one of R 1 and R 2 is isobutyl.
8. The composition of claim 1 wherein at least one of R 1 and R 2 is sec-butyl.
9. The composition of claim 1 wherein at least one of R 1 and R 2 is tert-butyl.
10. The composition of claim 1 wherein at least one of R 1 and R 2 is pentyl.
11. The composition of claim 1 wherein at least one of R 1 and R 2 is iso-pentyl.
12. The composition of claim 1 wherein at least one of R 1 and R 2 is tert-pentyl.
13. The composition of claim 1 wherein at least one of R 1 and R 2 is hexyl.
14. The composition of claim 1 wherein at least one of R 1 and R 2 is neo-pentyl.