Granted Patent B1

US 10,460,750 · App. 15/978,660 · Granted Oct 29, 2019

Abstract

Claims (73)

1. A magnetic recording head having an air bearing surface (ABS), comprising:

a main pole;

a side shield laterally spaced from the main pole by a first side gap and a second side gap;

an electrically conductive non-magnetic gap material layer disposed between the main pole and the side shield in the first side gap; and

a dielectric non-magnetic gap material matrix and a conformal dielectric spacer layer disposed between the main pole and the side shield in the second side gap.

2. The magnetic recording head of claim 1 , wherein the conformal dielectric spacer layer comprises a material that is different in composition from the electrically conductive non-magnetic gap material layer and from the dielectric non-magnetic gap material matrix.

3. The magnetic recording head of claim 2 , wherein:

the conformal dielectric spacer layer comprises silicon oxide;

the electrically conductive non-magnetic gap material layer comprises ruthenium; and

the dielectric non-magnetic gap material matrix comprises aluminum oxide.

4. The magnetic recording head of claim 1 , wherein:

the first side gap is located between the ABS and the second side gap;

a first portion of the side shield is located between a second portion of the side shield and the ABS;

the first side gap is located between the main pole and the first portion of the side shield;

the second side gap is located between the main pole and the second portion of the side shield;

the first side gap and the first portion of the side shield are located between the ABS and a first throat height from the ABS; and

the second side gap and the second portion of the side shield are located between the first throat height and a second throat height from the ABS, wherein the second throat height is greater than the first throat height.

5. The magnetic recording head of claim 4 , wherein the first portion of the side shield is conformal to the main pole, and the second portion of the side shield is either conformal or non-conformal to the main pole.

6. The magnetic recording head of claim 5 , wherein:

the side shield further comprises a straight first throat height sidewall that is parallel to the ABS and is laterally offset from the ABS by the first throat height; and

the first throat height sidewall is located between the first and the second portions of the side shield.

7. The magnetic recording head of claim 6 , wherein the side shield further comprises:

a pair of second throat height sidewalls that are parallel to the ABS and are laterally offset from the ABS by the second throat height;

a pair of widthwise sidewalls that extend perpendicular to the ABS and are physically exposed in the ABS; and

connection sidewalls which connect the first throat height sidewall to the pair of second throat height sidewalls, wherein the connection sidewalls are adjoined to the first throat height sidewall at a respective edge at an angle in a range from 20 degrees to 70 degrees.

8. The magnetic recording head of claim 7 , wherein the second side gap is located between the connection sidewalls and the main pole.

9. The magnetic recording head of claim 1 , wherein:

only the electrically conductive non-magnetic gap material layer is located in the first side gap;

the electrically conductive non-magnetic gap material layer, the conformal dielectric spacer layer and the dielectric non-magnetic gap material matrix are located in the second side gap;

the electrically conductive non-magnetic gap material layer is located adjacent to the main pole in the first and the second side gaps;

the conformal dielectric spacer layer is located adjacent to the side shield in the second gap; and

the dielectric non-magnetic gap material matrix is located between the electrically conductive non-magnetic gap material layer and the conformal dielectric spacer layer in the second side gap.

10. The magnetic recording head of claim 1 , further comprising:

a leading-edge plate located on a side of the main pole and having a planar interface with a planar portion of the conformal dielectric spacer layer within a two-dimensional plane that is perpendicular to the ABS; and

a seed layer located between the side shield and the leading-edge plate, and having an extent that is bounded by the conformal dielectric spacer layer and the ABS,

wherein the conformal dielectric spacer layer further comprises a sidewall portion that extends along directions that are perpendicular to the planar interface between the leading-edge plate and the planar portion of the conformal dielectric spacer layer, and wherein the conformal dielectric spacer layer contains a recess region through which the non-magnetic gap material layer and the main pole extend toward the ABS.

11. A magnetic recording head having an air bearing surface (ABS), comprising:

a main pole; and

a side shield laterally spaced from the main pole by a first side gap and a second side gap,

wherein:

a first portion of the side shield is located between a second portion of the side shield and the ABS;

a straight first throat height sidewall of the side shield is parallel to the ABS and is laterally offset from the ABS by a first throat height;

the first throat height sidewall is located between the first and the second portions of the side shield; and

a pair of second throat height sidewalls of the side shield are parallel to the ABS and are laterally offset from the ABS by a second throat height which is greater than the first throat height; and

further comprising:

an electrically conductive non-magnetic gap material layer disposed between the main pole and the first portion of the side shield in the first side gap; and

a dielectric non-magnetic gap material matrix and a conformal dielectric spacer layer disposed between the main pole and the second portion of the side shield in the second side gap.

12. The magnetic recording head of claim 11 , wherein

the first side gap is located between the ABS and the second side gap;

the first side gap is located between the main pole and the first portion of the side shield;

the second side gap is located between the main pole and the second portion of the side shield;

the first side gap and the first portion of the side shield are located between the ABS and the first throat height from the ABS; and

the second side gap and the second portion of the side shield are located between the first throat height and the second throat height.

13. The magnetic recording head of claim 12 , wherein the first portion of the side shield is conformal to the main pole, and the second portion of the side shield is either conformal or non-conformal to the main pole.

14. The magnetic recording head of claim 11 , wherein the conformal dielectric spacer layer comprises a material that is different in composition from the electrically conductive non-magnetic gap material layer and from the dielectric non-magnetic gap material matrix.

15. The magnetic recording head of claim 14 , wherein:

the conformal dielectric spacer layer comprises silicon oxide;

the electrically conductive non-magnetic gap material layer comprises ruthenium; and

the dielectric non-magnetic gap material matrix comprises aluminum oxide.

16. The magnetic recording head of claim 14 , wherein:

only the electrically conductive non-magnetic gap material layer is located in the first side gap;

the electrically conductive non-magnetic gap material layer, the conformal dielectric spacer layer and the dielectric non-magnetic gap material matrix are located in the second side gap;

the electrically conductive non-magnetic gap material layer is located adjacent to the main pole in the first and the second side gaps;

the conformal dielectric spacer layer is located adjacent to the side shield in the second gap; and

the dielectric non-magnetic gap material matrix is located between the electrically conductive non-magnetic gap material layer and the conformal dielectric spacer layer in the second side gap.

17. The magnetic recording head of claim 16 , further comprising:

a leading-edge plate located on a side of the main pole and having a planar interface with a planar portion of the conformal dielectric spacer layer within a two-dimensional plane that is perpendicular to the ABS; and

a seed layer located between the side shield and the leading-edge plate, and having an extent that is bounded by the conformal dielectric spacer layer and the ABS,

wherein the conformal dielectric spacer layer further comprises a sidewall portion that extends along directions that are perpendicular to the planar interface between the leading-edge plate and the planar portion of the conformal dielectric spacer layer, and wherein the conformal dielectric spacer layer contains a recess region through which the non-magnetic gap material layer and the main pole extend toward the ABS.

18. The magnetic recording head of claim 11 , wherein the side shield further comprises:

a pair of widthwise sidewalls that extend perpendicular to the ABS and are physically exposed in the ABS; and

connection sidewalls which connect the first throat height sidewall to the pair of second throat height sidewalls, wherein the connection sidewalls are adjoined to the first throat height sidewall at a respective edge at an angle in a range from 20 degrees to 70 degrees.

19. The magnetic recording head of claim 18 , wherein the second side gap is located between the connection sidewalls and the main pole.

Assignments (6)