IP Library Granted Patent US 10,414,783
Granted Patent B2
US 10,414,783 · App. 15/994,110 · Granted Sep 17, 2019

Chlorosilylarylgermanes, method for preparation thereof and use thereof

Inventors: Julian Teichmann (Frankfurt am Main, DE); Matthias Wagner (Niddatal, DE); Hans-Wolfram Lerner (Oberursel, DE)
Assignee: Evonik Degussa GmbH
C07F7/30H01L21/02532H01L21/02628H01L21/2053C07B2200/13
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Quick Facts
Patent No.
US 10,414,783
App. No.
15/994,110
Granted
Sep 17, 2019
Kind
B2
Abstract

A novel compound chlorosilylarylgermane, a method for preparing the compound, and the use of the compound are described. A method for preparing trichlorosilyltrichlorogermane and the use of trichlorosilyltrichlorogermane are also described.

Claims (29)

1. A chlorosilylarylgermane of formula (I):

XGe(Y 2 )—SiCl 3   (I),

where X=Y or X=[—Ge(Y 2 )—SiCl 3 ] and

each Y is independently a phenyl group.

2. The chlorosilylarylgermane according to claim 1 , which is selected from the group consisting of trichlorosilyltriphenylgermane and 1,2-bis(trichlorosilyl)-1,1,2,2-tetraphenyldigermane.

3. A method for preparing the chlorosilylarylgermane according to claim 1 , the method comprising:

(a) dissolving an arylchlorogermane with hexachlorodisilane in a solvent and

(b) reacting in the presence of a catalyst at a temperature of 5 to 40° C., wherein the aryl groups of the arylchlorogermane are each independently phenyl.

4. The method according to claim 3 , wherein the reacting (b) is carried out at room temperature.

5. The method according to claim 3 , wherein

the arylchlorogermane is at least one selected from the group consisting of

a triarylchlorogermane and a diaryldichlorogermane,

a molar ratio of the triarylchlorogermane, when present, to hexachlorodisilane is 1:1, and

a molar ratio of the diaryldichlorogermane, when present, to hexachlorodisilane is 1:2.

6. The method according to claim 3 , wherein the arylchlorogermane is at least one selected from the group consisting of triphenylchlorogermane and diphenyldichlorogermane.

7. The method according to claim 3 , wherein the solvent is dichloromethane.

8. The method according to claim 3 , wherein the catalyst comprises a phosphonium chloride [R 4 P]Cl or an ammonium chloride salt [R 4 N]Cl, where each R is independently Me, Et, iPr, nBu, Ph.

9. The method according to claim 3 , wherein the catalyst is used in an amount of 0.001 to 1 mol per mole of hexachlorodisilane.

10. The method according to claim 3 , wherein at least 5 mol of the solvent is used per mole of hexachlorodisilane.

11. The method according to claim 3 , wherein

the reacting (b) is carried out with thorough mixing and over a period of 1 to 24 hours,

the solvent is subsequently removed, and

the chlorosilylarylgermane is obtained as a crystalline product.

12. A method for generating a GeSi layer, the method comprising:

preparing the GeSi layer from the chlorosilylarylgermane according to claim 1 .

13. A method for preparing trichlorosilyltrichlorogermane, the method comprising:

dissolving GeCl 4 with hexachlorodisilane in a solvent and reacting in the presence of a catalyst at a temperature of 5 to 40° C.

14. A method for generating a GeSi layer, the method comprising:

preparing the GeSi layer from trichlorosilyltrichlorogermane obtained by the method according to claim 13 .

Assignments (2)
CHANGE OF NAME Recorded Jan 31, 2020
From: EVONIK DEGUSSA GMBH
To: EVONIK OPERATIONS GMBH
Reel/Frame 051765/0166 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 22, 2019
From: TEICHMANN, JULIAN; WAGNER, MATTHIAS; LERNER, HANS-WOLFRAM
To: EVONIK DEGUSSA GMBH
Reel/Frame 048406/0373 →
Priority Claims (1)
EP 17173940 · Jun 1, 2017 · regional
Continuity (1)
Related Publication 20180346494A1 · Dec 6, 2018