IP Library Granted Patent US 11,574,876
Granted Patent B2
US 11,574,876 · App. 16/008,961 · Granted Feb 7, 2023

Microchip charge patterning

Inventors: Eugene M. Chow (Fremont, CA); JenPing Lu (Fremont, CA); Armin R. Volkel (Mountain View, CA); Bing R. Hsieh (Pleasanton, CA); Gregory L. Whiting (Mountain View, CA); Sean E. Doris (San Francisco, CA)
Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
H01L23/544H01L24/95H01L2223/5442H01L2223/54426H01L2223/54433H01L2224/95085H01L2224/95145H01L2924/10253H01L2924/10329
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,574,876
App. No.
16/008,961
Granted
Feb 7, 2023
Kind
B2
Abstract

A method of forming a charge pattern on a microchip includes depositing a material on the surface of the microchip, and immersing the microchip in a fluid to develop charge in or on the material through interaction with the surrounding fluid.

Claims (9)

1. A method of forming a charge pattern on a microchip, comprising:

depositing a first film of a first polymer on an insulator surface of the microchip and photolithographically defining the first film to expose a portion of the insulator surface;

depositing a second film of a second polymer at least partially on the first film;

photolithographically patterning the second polymer to define a region separate from the portion of the first region, wherein the first polymer and the second polymer retain one of either different charges or different magnitudes of a same charge to form the charge pattern; and

immersing the microchip in a non-polar fluid comprising one selected from the group consisting of: an isoparafinnic liquid, a hydrocarbon liquid and dodecane.

2. The method as claimed in claim 1 , wherein depositing the first polymer comprises depositing one of an anionic polyelectrolyte, cationic polyelectrolyte, a non-ionic polymer, polystyrenesulfonic acid, poly(diallyldimethylammonium chloride), polyethylene, or polyvinylalcohol.

3. The method as claimed in claim 1 , wherein the non-polar fluid includes charge control agents comprise one of ionic amphiphilic surfactant materials, non-ionic amphiphilic surfactant materials, lecithin, span-80, ALOHOS, OLOA, or AOT.

4. The method of claim 1 , wherein depositing the material comprises one of spin-coating, printing, dip-coating, self-assembly, or vapor deposition.

5. The method as claimed in claim 1 , further comprising singulating the wafer into microchips.

Assignments (10)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 6, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073842/0479 →
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT RF 064760/0389 Recorded Feb 13, 2024
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: XEROX CORPORATION
Reel/Frame 068261/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVAL OF US PATENTS 9356603, 10026651, 10626048 AND INCLUSION OF US PATENT 7167871 PREVIOUSLY RECORDED ON REEL 064038 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064161/0001 →
SECURITY INTEREST Recorded Jun 22, 2023
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 064760/0389 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064038/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 14, 2018
From: CHOW, EUGENE M.; LU, JENPING; VOLKEL, ARMIN R.; HSIEH, BING R.; WHITING, GREGORY L.; DORIS, SEAN E.
To: PALO ALTO RESEARCH CENTER INCORPORATED
Reel/Frame 046094/0253 →
Continuity (2)
Division 13652194 · Oct 15, 2012
Related Publication 20180294232A1 · Oct 11, 2018