Microfabricated droplet dispensor with immiscible fluid

1. A microfabricated droplet dispenser, comprising:

a microfluidic channel formed in a substrate;

a first fluid, including at least one target particle and at least one identifying bead and non-target material;

a microfabricated MEMS fluidic valve, configured to open and close the microfluidic channel and formed in the same substrate wherein the MEMS valve when in the sort position, separates the target particle and the bead and redirects the target particle and the bead into a first sort channel containing the first fluid;

a second fluid, immiscible with the first fluid;

a second microfluidic channel containing the second immiscible fluid

a nozzle disposed between the first sort channel and the second microfluidic channel, wherein the nozzle forms a droplet comprising a quantity of the first fluid along with the target particle and the bead, wherein a dimension of the droplet is determined by a timing of opening and closing of the microfabricated microfluidic valve and the droplet is dispensed into the second microchannel wherein the droplet is dispensed by the nozzle into the second fluid; and

wherein both the droplet with the quantity of the first fluid and the second immiscible fluid flow within the second microfluidic channel formed in the substrate such that droplet contains the sorted target particle and the bead, along with a quantity of the first fluid.

2. The microfabricated droplet dispenser of claim 1 , further comprising:

an interrogation region in the microfluidic channel; and

a laser directed into the laser interrogation region, wherein the laser identifies target particles, and wherein the microfabricated MEMS fluidic valve is configured to separate the target particles from the non-target material in response to a signal from the interrogation region, and direct the target particle into the droplet.

3. The microfabricated droplet dispenser of claim 1 , further comprising:

a bead disposed in the first fluid, wherein the bead is attached to a plurality of fluorescent tags, wherein the fluorescent tags identify the bead with a fluorescent signal, and wherein the microfabricated MEMS fluidic valve is configured to separate the bead and direct the bead into the droplet, wherein the bead and a target particle, are located within the same droplet.

4. The microfabricated droplet dispenser of claim 1 , wherein the microfabricated MEMS fluidic valve, moves in a single plane when opening and closing, and wherein that plane is parallel to a surface of the substrate.

5. The microfabricated droplet dispenser of claim 1 , wherein the microfabricated MEMS fluidic valve, moves in a single plane when opening and closing, and moves as a result of electromagnetic forces acting on the microfabricated MEMS fluidic valve.

6. The microfabricated droplet dispenser of claim 1 , wherein the droplet includes at least one of a target cell and a fluorescently-labelled bead.

7. The microfabricated droplet dispenser of claim 6 , wherein the source of immiscible fluid is disposed symmetrically about the nozzle structure formed in the substrate.

8. The microfabricated droplet dispenser of claim 1 , wherein the droplet has a volume less than 0.1 nl.

9. The microfabricated droplet dispenser of claim 3 , wherein the bead comprises a plurality of fluorescent tags, such that the bead has an identifying fluorescent signature.

10. The microfabricated droplet dispenser of claim 9 , wherein the bead also comprises at least one antibody, that binds to an antigen on the at least one target particle.

11. The microfabricated droplet dispenser of claim 7 , wherein the source of immiscible fluid is disposed asymmetrically about the nozzle.

12. The microfabricated droplet dispenser of claim 3 , further comprising a laser focused on the microfluidic channel and directed onto the droplet, wherein the laser is configured to heat the droplet to coalesce adjacent droplets in the microfluidic channel.

13. The microfabricated droplet dispenser of claim 3 , wherein the microfluidic channel has a channel widened area, wherein the cross section of the channel increases and then decreases.

14. The microfabricated droplet dispenser of claim 3 , wherein the microchannel intersects the source of immiscible fluid in a butt junction.

15. The microfabricated droplet dispenser of claim 3 , wherein the target particles comprise at least one of T-cells, stem cells, cancer cells, tumor cells, proteins and DNA strands.

16. A method for forming a droplet in an immiscible fluid, comprising:

forming a first microfluidic channel on a substrate;

providing a first fluid flowing in the first microfluidic fluid channel;

opening and closing a microfabricated MEMS fluidic valve, to open and close the first microfluidic channel to separate at least one target particle and a bead with identifiers disposed thereon;

providing a source of an immiscible second fluid, immiscible with the first fluid, wherein the immiscible second fluid flows in a second fluidic channel;

forming a nozzle at the output of the first fluidic channel which dispenses a droplet containing the target particle and the bead into the second fluidic channel; and

wherein a dimension of the droplet is determined by a timing of opening and closing of the microfabricated microfluidic valve, and wherein the droplet encloses at least one of the bead and the target particle, and wherein both the droplet with the quantity of the first fluid and the second immiscible fluid flow within the second fluidic channel formed in the substrate.

17. The method of claim 16 , wherein the first fluid flowing in the microfluidic channel comprises target particles, beads, and non-target material, and the target particles comprise at least one of T-cells, stem cells, cancer cells, tumor cells, proteins and DNA strands.

18. The method of claim 16 , further comprising:

identifying a target particle among non-target material in a laser interrogation region;

opening and closing the microfabricated MEMS fluidic valve to separate the identified target particle from the non-target material in response to a signal from the interrogation region, and

directing the target particle into the droplet.

19. The method of claim 16 , further comprising:

providing a bead attached to a plurality of fluorescent tags, wherein the fluorescent tags specify the identity of the bead with a fluorescent signal,

separating the bead using the microfabricated MEMS fluidic valve; and

directing the bead into the droplet, wherein the bead and the target particle, are located within the same droplet.

20. The method of claim 16 , wherein the droplet is formed at the nozzle structure formed in the substrate.

21. The method of claim 16 , further comprising:

heating the droplet of fluid with a laser directed to the droplet.

22. The method of claim 16 , further comprising:

generating a first sort pulse to capture a labelled bead; and

then subsequently generating a second sort pulse to capture a target cell, wherein the sort pulses are generated such that the bead and a target particle are located within the same droplet dispensed into the second immiscible fluid.

23. The method of claim 16 , further comprising:

generating a first sort pulse to capture a target cell; and

then subsequently generating a second sort pulse to capture a labelled bead, wherein the sort pulses are generated such that the bead and a target particle are located within the same droplet dispensed into the second immiscible fluid.