Vapor deposition mask and organic EL display device
View Patent ↗The purpose is providing a vapor deposition mask with high rigidity which can evaporate a uniform thickness film. A vapor deposition mask including a mask body having a main opening, a side surface of the main opening, an upper surface intersecting the side surface, and a lower surface opposing the upper surface, a first insulator contacting the lower surface, and a second insulator contacting the upper and side surfaces, wherein the first insulator includes a first region inside the main opening, and a first opening in the first region, the second insulator includes a second region inside the main opening, and a second opening in the second region, the mask body is sandwiched between the first and second insulators, and one of the first and second insulators includes a region located inside the main opening more centrally than the other and not overlapping with the other and the mask body.
1. A vapor deposition mask comprising:
a mask body having a main opening part, an upper surface, a lower surface opposing the upper surface and a side surface connecting to the upper surface and the lower surface; and
a plurality of insulators covering the mask body, wherein
the plurality of insulators includes at least a first insulator and a second insulator,
the plurality of surfaces includes the upper surface, the lower surface and the side surface,
the first insulator is arranged along the lower surface,
the second insulator is arranged along the upper surface, and
the lower surface and the side surface make an acute angle.
2. The vapor deposition mask according to claim 1 , wherein
the second insulator is arranged along the side surface.
3. The vapor deposition mask according to claim 2 , wherein
the first insulator and the second insulator are connected to each other.
4. The vapor deposition mask according to claim 3 , wherein
the first insulator and the second insulator are connected to each other at an area overlapping the main opening part in a plan view.
5. The vapor deposition mask according to claim 1 , wherein
the first insulator includes a first opening part inside the main opening part, and a first region located between the main opening part and the first opening part, and
the second insulator includes a second opening part inside the main opening part, and a second region located between the main opening part and the second opening part.
6. The vapor deposition mask according to claim 5 , wherein
one of the first region and the second region includes a portion without overlapping the mask body and the other of the first region and the second region.
7. The vapor deposition mask according to claim 6 , wherein
a film thickness of the one is thinner than a film thickness of the other.
8. The vapor deposition mask according to claim 5 , wherein
the second insulator has a first bending portion inside the first region.
9. An organic EL display device comprising a light emitting layer formed using the vapor deposition mask according to claim 1 .
10. The vapor deposition mask according to claim 1 , further comprising a third insulator, wherein
the second insulator is between the third insulator and the mask body.
11. The vapor deposition mask according to claim 10 , wherein
the third insulator is arranged along the upper surface and the side surface.
12. The vapor deposition mask according to claim 10 , wherein
the first insulator and the third insulator are connected to each other at an area without overlapping the mask body in a plan view.
13. The vapor deposition mask according to claim 10 , wherein
the first insulator and the second insulator are connected to each other.
14. The vapor deposition mask according to claim 10 , wherein
the first insulator includes a first opening part inside the main opening part, and a first region located between the main opening part and the first opening part,
the second insulator includes a second opening part inside the main opening part, and a second region located between the main opening part and the second opening part, and
the third insulator includes a portion overlapping the main opening part in a plan view.
15. The vapor deposition mask according to claim 14 , wherein
the portion has a second bending portion.
16. The vapor deposition mask according to claim 10 , wherein
a film thickness of the third insulator is the thinnest among a film thickness of the first insulator, a film thickness of the second insulator and a film thickness of the third insulator.