Apparatuses including electrodes having a conductive barrier material and methods of forming same
Apparatuses and methods of manufacture are disclosed for phase change memory cell electrodes having a conductive barrier material. In one example, an apparatus includes a first chalcogenide structure and a second chalcogenide structure stacked together with the first chalcogenide structure. A first electrode portion is coupled to the first chalcogenide structure, and a second electrode portion is coupled to the second chalcogenide structure. An electrically conductive barrier material is disposed between the first and second electrode portions.
1. A memory cell, comprising:
a phase change device configured to store one or more bits of data and coupled to a first electrode;
an electrically conductive barrier material comprising a first portion and a second portion, the first portion coupled to the first electrode, and the second portion coupled to a second electrode; and
a switch integrally formed in the memory, cell with the phase change device, the first electrode, the electrically conductive barrier material comprising the first portion and the second portion, and the second electrode, wherein the first and second portions of the electrically conductive barrier material are formed together in situ.
2. The memory cell of claim 1 , wherein the switch comprises a chalcogenide switch.
3. A memory cell, comprising:
a phase change device configured to store one or more bits of data and coupled to a first electrode;
an electrically conductive barrier material comprising a first portion and a second portion, the first portion coupled to the first electrode, and the second portion coupled to a second electrode, wherein the first portion of the electrically conductive barrier material comprises tungsten silicide, and wherein the second portion of the electrically conductive barrier material comprises titanium nitride; and
a switch integrally formed in the memory cell with the phase change device, the first electrode, the electrically conductive barrier material comprising the first portion and the second portion, and the second electrode.
4. An apparatus, comprising:
a phase change device configured to store one or more bits of data and coupled to a first electrode;
an electrically conductive barrier material comprising a first portion and a second portion, the first portion coupled to the first electrode, and the second portion coupled to a second electrode, wherein the first portion and the second portion of the electrically conductive harrier material are separate portions of the electrically conductive barrier material; and
a switch integrally formed with the phase change device, the first electrode, the electrically conductive barrier material comprising the first portion and the second portion, and the second electrode, wherein the switch is coupled to the second electrode.
5. The apparatus of claim 4 , wherein the first portion and the second portion of the electrically conductive barrier material are contiguous to each other.
6. The apparatus of claim 4 , wherein the electrically conductive barrier material is between approximately 5 and 50 ångströms in thickness.
7. The apparatus of claim 4 , wherein the first and second electrodes are substantially not thermally conductive.
8. The apparatus of claim 4 , wherein the switch comprises a chalcogenide switch.
9. The apparatus of claim 4 , wherein the electrically conductive barrier material is at least partially amorphous or at least partially crystalline.
10. An apparatus, comprising:
a phase change device configured to store one or more bits of data and coupled to a first electrode;
an electrically conductive barrier material comprising a first portion and a second portion, the first portion coupled to the first electrode, and the second portion coupled to a second electrode; and
a switch integrally formed with the phase change device, the first electrode, the electrically conductive barrier material comprising the first portion and the second portion, and the second electrode, wherein the switch is coupled to the second electrode, wherein the first electrode is disposed between the phase change device and the electrically conductive barrier material, wherein the second electrode is disposed between the switch and the electrically conductive barrier material.
11. An apparatus, comprising:
a phase change device configured to store one or more bits of data and coupled to a first electrode;
an electrically conductive barrier material comprising a first portion and a second portion, the first portion coupled to the first electrode, and the second portion coupled to a second electrode;
a switch integrally formed with the phase change device, the first electrode, the electrically conductive barrier material comprising the first portion and the second portion, and the second electrode, wherein the switch is coupled to the second electrode;
a first access line electrode coupled to the phase change device; and
a second access line electrode coupled to the switch.
12. The apparatus of claim 11 , further comprising:
a first access line coupled to the first access line electrode; and
a second access line coupled to the second access line electrode, wherein the first and second access lines are operable to select the one or more bits of data.