Nanovoided electroactive polymer devices, systems, and methods

1. An electroactive device comprising:

an electroactive polymer element having a first surface and a second surface opposite the first surface, the electroactive polymer element comprising a nanovoided polymer material;

a primary electrode abutting the first surface of the electroactive polymer element; and

a secondary electrode abutting the second surface of the electroactive polymer element;

wherein:

the electroactive polymer element is deformable from an initial state to a deformed state by application of an electrostatic field produced by a potential difference between the primary electrode and the secondary electrode;

the electroactive polymer element has a maximum thickness of from 100 nm to 10 μm in an undeformed state; and

each of the primary electrode and the secondary electrode has a thickness of from 10 nm to 1 μm.

2. The electroactive device of claim 1 , wherein the deformed state of the electroactive polymer element comprises a compressed state.

3. The electroactive device of claim 1 , wherein the nanovoided polymer material defines a plurality of voids having diameters of from 10 nm to 1 μm.

4. The electroactive device of claim 1 , wherein the nanovoided polymer material defines a plurality of voids collectively occupying from 10% by volume to 90% by volume of the nanovoided polymer material when the electroactive polymer element is in an undeformed state.

5. The electroactive device of claim 1 , wherein the nanovoided polymer material comprises a polymer having an elastic modulus of 10 GPa or less.

6. An electroactive device comprising:

a primary electrode;

a secondary electrode overlapping the primary electrode;

a tertiary electrode overlapping the primary electrode and the secondary electrode;

a first electroactive polymer element disposed between and abutting the primary electrode and the secondary electrode, the first electroactive polymer element comprising a nanovoided polymer material; and

a second electroactive polymer element disposed between and abutting the secondary electrode and the tertiary electrode, the second electroactive polymer element comprising a nanovoided polymer material;

wherein:

the first electroactive polymer element is deformable from an initial state to a deformed state when a first electrostatic field is generated between the primary electrode and the secondary electrode; and

the second electroactive polymer element is deformable, in conjunction with deformation of the first electroactive polymer element, from an initial state to a deformed state when a second electrostatic field is generated between the secondary electrode and the tertiary electrode;

the first electroactive polymer element has a maximum thickness of from 100 nm to 10 μm in an undeformed state; and

each of the primary electrode and the secondary electrode has a thickness of from 10 nm to 1 μm.

7. The electroactive device of claim 6 , wherein the first electrostatic field is equal to the second electrostatic field.

8. A method for forming an electroactive device comprising:

positioning an electroactive polymer element on a primary electrode such that the primary electrode abuts a first surface of the electroactive polymer element, the electroactive polymer element comprising a nanovoided polymer material; and

positioning a secondary electrode on the electroactive polymer element such that a second surface of the electroactive polymer element opposite the first surface abuts the secondary electrode;

wherein:

the electroactive polymer element is deformable from an initial state to a deformed state when a voltage difference of at least a certain value is applied between the primary electrode and the secondary electrode;

the electroactive polymer element has a maximum thickness of from 100 nm to 10 μm in an undeformed state; and

each of the primary electrode and the secondary electrode has a thickness of from 10 nm to 1 μm.

9. The method of claim 8 , further comprising forming the electroactive polymer element comprising the nanovoided polymer material by:

depositing a mixture comprising a curable material and a cavitation agent;

exposing the mixture to a form of radiation sufficient to cure the curable material and decompose the cavitation agent to form a cured polymer material comprising one or more decomposition products of the cavitation agent in a plurality of defined regions; and

removing at least a portion of the one or more decomposition products from the cured polymer material.

10. The method of claim 9 , wherein the cavitation agent comprises a beta-keto acetic acid.

11. The method of claim 9 , wherein:

the mixture further comprises a solvent; and

the cured polymer material further comprises the solvent in the plurality of defined regions.

12. The method of claim 8 , further comprising forming the electroactive polymer element comprising the nanovoided polymer material by:

depositing a mixture comprising a curable material and a solvent;

curing the curable material to form a cured polymer material comprising the solvent in a plurality of defined solvent regions; and

removing at least a portion of the solvent from the cured polymer material.

13. The method of claim 12 , wherein removing at least the portion of the solvent from the cured polymer material forms a plurality of voids resulting in the nanovoided polymer material.

14. The method of claim 12 , wherein the curable material comprises an acrylate material and the mixture further comprises a free radical initiator of at least one of a thermal initiator or an ultraviolet initiator.

15. The method of claim 12 , wherein the cured polymer material comprises poly(dimethylsiloxane).

16. The method of claim 12 , wherein depositing the mixture comprising the curable material and the solvent further comprises depositing the mixture on the primary electrode.

17. The method of claim 12 , wherein depositing the mixture comprising the curable material and the solvent further comprises depositing the mixture by at least one of spin coating or inkjet deposition.

18. The method of claim 12 , wherein the cured polymer material comprises a silicone-based polymer material.

19. The method of claim 18 , wherein the mixture further comprises a hydrosilylation catalyst.