Elliptical structure for bulk acoustic wave resonator
An elliptical-shaped resonator device. The device includes a bottom metal plate, a piezoelectric layer overlying the bottom metal plate, and a top metal plate overlying the piezoelectric layer. The top metal plate, the piezoelectric layer, and the bottom metal plate are characterized by an elliptical shape having a horizontal diameter (dx) and a vertical diameter (dy), which can be represented as ellipse ratio R=dx/dy. Using the elliptical structure, the resulting bulk acoustic wave resonator (BAWR) can exhibit equivalent or improved insertion loss, higher coupling coefficient, and higher quality factor compared to conventional polygon-shaped resonators.
1. An RF filter circuit device, the device comprising:
a substrate member;
a dielectric passivation layer overlying the substrate member;
eleven elliptical-shaped resonator devices overlying the substrate member and configured underlying the dielectric passivation layer, each of the elliptical shaped resonators comprising
a bottom metal plate;
a piezoelectric layer overlying the bottom metal plate; and
a top metal plate overlying the piezoelectric layer;
wherein the top metal plate, the piezoelectric layer, and the bottom metal plate are characterized by an elliptical shape having a horizontal diameter (dx) and a vertical diameter (dy), which can be represented as ellipse ratio R=dx/dy; and
wherein seven of the elliptical-shaped resonator devices are configured in a series configuration; and wherein four of the elliptical-shaped resonator devices are configured between a junction of the series configuration and ground, the junctions being before the series configuration, after the second resonator in the series configuration, after the fourth resonator in the series configuration, and after the sixth resonator in the series configuration.
2. The device of claim 1 wherein the ellipse ratio R ranges from about 1.20 to about 2.00.
3. The device of claim 1 further comprising one or more pillar-type energy confinement features (ECFs) coupled to the top metal plate or the bottom metal plate;
wherein the one or more pillar-type ECFs comprises a dielectric material, a metal material, or a combination of dielectric and metal materials.
4. The device of claim 1 further comprising one or more cavity-type energy confinement features (ECFs) configured within the top metal plate or the bottom metal plate.
5. The device of claim 1 wherein the piezoelectric layer includes materials or alloys having at least one of the following: AlN, AlGaN, GaN, InN, InGaN, AlInN, AlInGaN, ScAlN, ScGaN, AlScYN, and BN.