Power semiconductor device including a spacer
At the time of clamping, excessive stress is applied to bonding parts between substrates and input/output terminals, which may cause the bonding parts to be detached and cause the substrates to be cracked. A lower electrode of a power semiconductor element 11 is connected via a bonding material 13 to a first interconnection layer 12 arranged on a lower surface of the power semiconductor element 11 , and an upper electrode 14 of the power semiconductor element 11 is connected via the bonding material 13 to a second interconnection layer 15 arranged on an upper surface. Also, a second main terminal 16 electrically connected to the upper electrode 14 of the power semiconductor element 11 is connected via the bonding material 13 to the second interconnection layer 15 and contacts and is positioned on a third interconnection layer 24 (spacer) arranged to be parallel to the first interconnection layer 12 on the lower surface. An insulating layer 26 is laminated on a surface of each of the first interconnection layer 12 to the third interconnection layer 24 opposite the bonding material 13 , and a heat dissipating layer 27 is laminated on the insulating layer 26.
1. A power semiconductor device comprising:
a semiconductor element including an upper electrode and a lower electrode;
a first interconnection layer arranged to be opposed to the lower electrode of the semiconductor element and connected to the lower electrode of the semiconductor element via a bonding material;
a second interconnection layer arranged to be opposed to the upper electrode of the semiconductor element and connected to the upper electrode of the semiconductor element via the bonding material;
a first main terminal connected to the first interconnection layer via the bonding material;
a second main terminal connected to the second interconnection layer via the bonding material; and
a spacer that is arranged to be parallel to the first interconnection layer or the second interconnection layer,
wherein the first main terminal or the second main terminal comprises:
a first portion positioned to be in contact with the spacer and one of the first interconnection layer or the second interconnection layer, such that the first portion of the first main terminal or the second main terminal is disposed between the spacer and the one of the first interconnection layer or the second interconnection layer in a recess of the spacer, and
a second portion positioned to extend beyond a sealed body of the power semiconductor device such that the second portion is exposed, and
wherein at least part of the second interconnection layer, the bonding material, the second main terminal and the spacer are overlapped in a direction orthogonal to a lengthwise direction of the second main terminal.
2. The power semiconductor device according to claim 1 , wherein the spacer is a third interconnection layer connected via the bonding material to an opposite surface of a bonding surface between the first interconnection layer or the second interconnection layer and the first main terminal or the second main terminal.
3. The power semiconductor device according to claim 2 , wherein the first interconnection layer and the third interconnection layer are separated from a lead frame.
4. The power semiconductor device according to claim 2 , wherein
the first interconnection layer is connected via the bonding material to a side of the lower electrode of the semiconductor element, and the second interconnection layer is connected via the bonding material to a side of the upper electrode of the semiconductor element,
an insulating layer and a heat dissipating layer are laminated on a side of each of the first interconnection layer and the second interconnection layer opposite a bonding surface with the semiconductor element, and
an insulating layer and a heat dissipating layer are laminated on a side of the third interconnection layer opposite a bonding surface with the first main terminal or the second main terminal.
5. The power semiconductor device according to claim 1 , wherein the first main terminal or the second main terminal is mounted at a predetermined position on the spacer.
6. The power semiconductor device according to claim 1 , wherein the sealed body comprises a sealing resin configured to enclose the semiconductor element and the first portion of the first main terminal or the second main terminal.
7. The power semiconductor device according to claim 6 , wherein a cross-section of the sealed body including the sealing resin is structured to form a hexagonal shape.
8. The power semiconductor device according to claim 1 , wherein the at least part of the second interconnection layer, the bonding material, the second main terminal and the spacer are overlapped in order of the second interconnection layer, the bonding material, the second main terminal and the spacer.