IP Library Granted Patent US 10,319,553
Granted Patent B2
US 10,319,553 · App. 16/084,433 · Granted Jun 11, 2019

Method for controllably growing ZnO Nanowires

Inventors: Jonas Tirén (Uppsala, SE); Jan-Otto Carlsson (Uppsala, SE); Helena Tenerz (Uppsala, SE); Patrik Hollman (Uppsala, SE)
Assignee: Lightlab Sweden AB
H01J9/025H01L21/02554H01L21/02603H01L21/02614B82Y30/00H01J2201/30446
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Quick Facts
Patent No.
US 10,319,553
App. No.
16/084,433
Granted
Jun 11, 2019
Kind
B2
Abstract

The present invention relates to a method for controllably growing ZnO nanowires, for example to be used in relation to field emission lighting. In particular, the invention relates to a method of controlling thermal oxidation conditions to achieve steady-state conditions between an oxygen consumption rate by a growing oxide on a surface of a structure and the decomposition rate of the oxygen-carrying species within the chamber. The invention also relates to a corresponding field emission cathode.

Claims (34)

1. A method for controllably growing zinc oxide (ZnO) nanowires on a surface of a structure by means of thermal oxidation, the structure comprising a zinc layer covering at least a portion of the structure, the method comprising:

arranging the structure within a thermal oxidation chamber, the chamber having a gas inlet and a gas outlet for allowing a gas flow through the chamber;

providing a gas comprising an oxygen-carrying precursor through the gas inlet of the chamber; and

controlling a concentration of oxygen along the surface of the structure by:

controlling a temperature within the chamber; and

controlling a gas flow of the gas comprising the oxygen-carrying precursor through the chamber,

such that steady-state conditions are achieved between an oxygen consumption rate by a growing oxide on the surface of the structure and the decomposition rate of the oxygen-carrying species within the chamber, thereby maintaining the same zinc oxidation conditions along the surface of the structure within the chamber.

2. The method according to claim 1 , wherein said gas comprises a plurality of oxygen carrying precursors.

3. The method according to claim 1 , further comprising controlling a gas pressure to provide substantially uniform growth conditions at the entire surface of the structure, at a given time.

4. The method according to claim 1 , further comprising controlling the gas flow such that a resulting concentration of oxygen is substantially uniform for the entire surface of the structure.

5. The method according to claim 1 , wherein the oxygen-carrying precursor is selected from a group comprising of O 2 , CO 2 , N 2 O and H 2 O.

6. The method according to claim 1 , further comprising selecting a concentration of the oxygen precursor of the gas provided to the chamber.

7. The method according to claim 1 , wherein the gas is a gas mixture further comprising at least one of nitrogen and argon.

8. The method according to claim 1 , wherein the temperature is controlled according to a predetermined temperature curve.

9. The method according to claim 8 , wherein the temperature curve is selected based on a decomposition rate of the oxygen-carrying precursor.

10. The method according to claim 8 , wherein the temperature curve comprises ramping up the temperature to an oxidation temperature using a fixed ramp, maintaining the oxidation temperature for a predetermined time, and ramping down the temperature using a fixed ramp.

11. The method according to claim 8 , wherein the temperature curve comprises:

ramping up the temperature to a first oxidation temperature using a first ramp rate;

performing thermal oxidation starting at the first oxidation temperature for a first period of time to form an initial oxide layer;

ramping up the temperature to a second oxidation temperature using a second ramp rate;

performing thermal oxidation at the second oxidation temperature for a predetermined period of time to initialize and to maintain nanowire growth;

ramping up the temperature to a third oxidation temperature using a third ramp rate and performing thermal oxidation during the temperature ramp to grow nanowires; and

when the third oxidation temperature is reached, ramping down the temperature to end the oxidation using a fourth ramp rate.

12. The method according to claim 11 , further comprising, when the third oxidation temperature is reached, ramping the temperature up or down to a fourth temperature using a fourth temperature ramp, and maintaining the fourth temperature for a predetermined period of time, before ramping down the temperature to end the oxidation using a fifth ramp rate.

13. The method according to claim 1 , wherein the third oxidation temperature within the chamber is equal to or lower than 625° C.

14. The method according to claim 1 , wherein a pressure within the chamber is a maximum of 1 atm.

15. The method according to claim 1 , further comprising:

preparing the structure by applying a predetermined thickness of a ZnO layer to the surface of the structure.

16. The method according to claim 1 , wherein the structure comprises at least one of copper and brass.

17. The method according to claim 1 , wherein the structure comprises a wire, a mesh or a plate.

18. The method according to claim 1 , wherein a length of the ZnO nanowires is selected to be between 2-100 um.

19. The method according to claim 1 , wherein a diameter of the ZnO nanowires is selected to be between 5-100 nm.

20. A field emission light source comprising a structure provided with ZnO nanowires grown according to claim 1 .

21. The field emission light source according to claim 19 , wherein the field emission light source is a UV light source.

Assignments (2)
CHANGE OF NAME Recorded Feb 3, 2023
From: LIGHTLAB SWEDEN AB
To: PUREFIZE TECHNOLOGIES AB
Reel/Frame 062658/0456 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 12, 2018
From: TIRÉN, JONAS; CARLSSON, JAN-OTTO; TENERZ, HELENA; HOLLMAN, PATRIK
To: LIGHTLAB SWEDEN AB
Reel/Frame 046854/0712 →
Priority Claims (1)
SE 1650356 · Mar 16, 2016 · national
Continuity (1)
Related Publication 20190080869A1 · Mar 14, 2019