Ti-Nb alloy sputtering target and production method thereof
Provided is a Ti—Nb alloy sputtering target containing 0.1 to 30 at % of Nb, the remainder of Ti and unavoidable impurities; and the Ti—Nb alloy sputtering target is characterized by having an oxygen content of 400 wtppm or less. Since the target in the present disclosure has a favorable surface texture with a low oxygen content and is readily processable due to the low hardness of the target, the Ti—Nb alloy sputtering target yields a superior effect of being able to suppress the generation of particles during sputtering.
1. A Ti—Nb alloy sputtering target having a composition consisting of Nb in an amount of 0.1 to 30 at % and the remainder being Ti and unavoidable impurities, an oxygen content of 400 wtppm or less, a Vicker's hardness of 150 Hv to 400 Hv, and a variation in Vicker's hardness within 10%, wherein the variation in Vicker's hardness is calculated based on the following formula: Variation (%) in Vicker's hardness=100×(maximum value of sampled locations−minimum value of sampled locations)/mean value of sampled locations.
2. The Ti—Nb alloy sputtering target according to claim 1 having a purity of 4N or higher.
3. The Ti—Nb alloy sputtering target according to claim 2 having a relative density of 99.9% or higher.
4. The Ti—Nb alloy sputtering target according to claim 1 having a relative density of 99.9% or higher.
5. A method of producing a Ti—Nb alloy sputtering target, the method comprising the steps of:
preparing a Ti material formed in a tile shape having a thickness from 1 mm to 5 mm and an equal side length from 10 mm to 50 mm and a Nb material formed in a plate shape or a ribbon shape having a thickness from 0.5 mm to 2 mm and a width from 2 mm to 50 mm;
placing the Ti material of the tile shape in a vacuum melting furnace to be melted;
adding the Nb material of the plate-shaped or ribbon-shaped in the vacuum melting furnace to alloy Ti—Nb;
casting a resulting alloy molten metal in a water-cooled copper crucible to prepare an ingot; and
subjecting an obtained Ti—Nb alloy ingot to plastic working into a target shape to produce a Ti—Nb alloy sputtering target, wherein the Ti—Nb alloy sputtering target has a variation in oxygen content of within 18%.
6. The method of producing a Ti—Nb alloy sputtering target according to claim 5 , wherein, after the Ti material of the tile shape is placed in the vacuum melting furnace and melted, the Nb material is then added in the vacuum melting furnace in the form of separate pieces at multiple separate times.
7. The method according to claim 6 , wherein the vacuum melting furnace is a vacuum skull melting furnace including a water-cooled copper crucible.