Display device, manufacturing method of display device, and electronic device
A display device of the present disclosure includes: a circuit unit including a semiconductor substrate and a capacitative element, in which the capacitative element includes, a dielectric layer which is formed in the semiconductor substrate, and extends in a substrate depth direction, a first electrode formed on one surface side of the dielectric layer to face the dielectric layer, and a second electrode formed on the other surface side of the dielectric layer to face the dielectric layer. An electronic device of the present disclosure includes the display device having the configuration described above.
1. A display device, comprising:
a driving circuit including a semiconductor substrate and a capacitative element,
wherein the driving circuit is one of a plurality of driving circuits respectively disposed in each of a plurality of pixels, each pixel including a light emitting unit, and wherein the driving circuit is configured to drive the light emitting unit;
wherein the capacitative element includes,
a dielectric layer which is formed in the semiconductor substrate, and extends in a substrate depth direction, the dielectric layer having first and second surface sides extending in parallel along the substrate depth direction,
a first electrode formed on the first surface side of the dielectric layer to contact the dielectric layer, and
a second electrode formed on the second surface side of the dielectric layer to contact the dielectric layer.
2. An electronic device including the display device according to claim 1 .
3. A display device,
a driving circuit including a semiconductor substrate and a capacitative element,
wherein the driving circuit is one of a plurality of driving circuits respectively disposed in each of a plurality of pixels, each pixel including a light emitting unit, and wherein the driving circuit is configured to drive the light emitting unit;
wherein the capacitative element includes
a dielectric layer which is formed in the semiconductor substrate, and extends in a substrate depth direction,
a first electrode formed on one surface side of the dielectric layer to face the dielectric layer, and
a second electrode formed on the other surface side of the dielectric layer to face the dielectric layer, and
wherein the driving circuit includes a driving transistor configured to drive the light emitting unit,
the dielectric layer and the first electrode are formed in an element separation region separating the pixels from each other, in the semiconductor substrate, and
the first electrode is electrically connected to one source/drain region of the driving transistor.
4. The display device according to claim 3 ,
wherein the dielectric layer and the first electrode are formed such that lower end portions of the dielectric layer and the first electrode are in a position deeper than a lower end of the element separation region, in the substrate depth direction.
5. The display device according to claim 3 ,
wherein the second electrode is formed on the one source/drain region side in the semiconductor substrate.
6. The display device according to claim 3 ,
wherein the second electrode is electrically connected to a power line.
7. An electronic apparatus including the display device according to claim 3 .
8. The electronic apparatus according to claim 7 ,
wherein the dielectric layer and the first electrode are formed such that lower end portions of the dielectric layer and the first electrode are in a position deeper than a lower end of the element separation region, in the substrate depth direction.
9. The electronic apparatus according to claim 8 ,
wherein the second electrode is formed on the one source/drain region side in the semiconductor substrate.
10. The electronic apparatus according to claim 9 ,
wherein the second electrode is electrically connected to a power line.
11. A manufacturing method of a display device provided with a driving circuit including a semiconductor substrate and a capacitative element, wherein the driving circuit is one of a plurality of driving circuits respectively disposed in each of a plurality of pixels, each pixel including a light emitting unit, and wherein the driving circuit is configured to drive the light emitting unit, the manufacturing method comprising:
forming a dielectric layer extending in a substrate depth direction, in the semiconductor substrate;
forming a first electrode on one surface side of the dielectric layer to face the dielectric layer; and then
forming a second electrode on the other surface side of the dielectric layer to face the dielectric layer,
wherein the driving circuit unit includes a driving transistor configured to drive the light emitting unit,
the dielectric layer and the first electrode are formed in an element separation region separating the pixels from each other, in the semiconductor substrate, and
the first electrode is electrically connected to one source/drain region of the driving transistor.