Low-particle gas enclosure systems and methods
The present teachings relate to various embodiments of a gas enclosure system that can have various components comprising a particle control system that can provide a low-particle zone proximal to a substrate. Various components of a particle control system can include a gas circulation and filtration system, a low-particle-generating motion system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. In addition to maintaining substantially low levels for each species of various reactive species, including various reactive atmospheric gases, such as water vapor and oxygen, for various embodiments of a gas enclosure system that have a particle control system, an on-substrate particle specification can be readily met. Accordingly, processing of various substrates in an inert, low-particle gas environment according to systems and methods of the present teachings can have substantially lower manufacturing defects.
1. A system comprising:
a gas enclosure assembly to contain a gas;
a printing system disposed within the gas enclosure assembly, the printing system comprising:
a printhead assembly comprising at least one printhead;
a substrate support apparatus;
a housing defining an interior; and
a service bundle comprising a plurality of lines held together in a bundle and routed through the interior of the housing, the plurality of lines being operatively connected to the printing system and configured to provide at least one of optical, electrical, mechanical, and fluidic function to the printing system; and
an exhaust system fluidically coupled with the housing, the exhaust system comprising an inlet and an outlet to exhaust gas from the housing and away from the substrate support apparatus;
wherein the printhead assembly is moveably mounted to move across the substrate support apparatus, and the service bundle is movable in response to motion of the printhead assembly across the substrate support apparatus.
2. The system of claim 1 , further comprising a gas circulation and filtration system fluidically coupled with the exhaust system.
3. The system of claim 1 , wherein the exhaust system is a first exhaust system, and the system further comprises a second exhaust system to exhaust gas proximal the printhead assembly away from the substrate support apparatus.
4. The gas enclosure system of claim 3 , further comprising a gas circulation and filtration system fluidically coupled with the second exhaust system.
5. The system of claim 1 , further comprising a motion system to position the printhead assembly and the substrate relative to one another.
6. The system of claim 5 , wherein the motion system is a split-axis motion system.
7. The system of claim 1 , wherein the gas enclosure assembly further comprises:
a printing system enclosure housing the printing system; and
an auxiliary enclosure, wherein the auxiliary enclosure is configured to be sealably isolated from the printing system.
8. The system of claim 1 , wherein the substrate support apparatus comprises a floatation table.
9. The system of claim 5 , wherein the motion system comprises an air bearing motion system.
10. The system of claim 1 , wherein the gas enclosure assembly contains the gas and the gas is an inert gas.
11. The system of claim 10 , wherein the inert gas is selected from nitrogen, any of the noble gases and combinations thereof.
12. The system of claim 1 , wherein the gas enclosure assembly contains the gas and the gas is clean dry air (CDA).
13. The system of claim 1 , further comprising a gas purification system.
14. The system of claim 13 , wherein the gas purification system is configured to maintain the gas at less than 100 ppm of a reactive specie.
15. The system of claim 14 , wherein the reactive specie is selected from water vapor and oxygen and combinations thereof.
16. The system of claim 1 , wherein the substrate support apparatus is configured to support a substrate of a size ranging from about generation 3.5 to about generation 10.