Semiconductor constructions; and methods for providing electrically conductive material within openings
View Patent ↗Some embodiments include methods for depositing copper-containing material utilizing physical vapor deposition of the copper-containing material while keeping a temperature of the deposited copper-containing material at greater than 100° C. Some embodiments include methods in which openings are lined with a metal-containing composition, copper-containing material is physical vapor deposited over the metal-containing composition while a temperature of the copper-containing material is no greater than about 0° C., and the copper-containing material is then annealed while the copper-containing material is at a temperature in a range of from about 180° C. to about 250° C. Some embodiments include methods in which openings are lined with a composition containing metal and nitrogen, and the lined openings are at least partially filled with copper-containing material. Some embodiments include semiconductor constructions having a metal nitride liner along sidewall peripheries of an opening, and having copper-containing material within the opening and directly against the metal nitride liner.
1. A semiconductor construction, comprising:
an electrically insulative material directly on a surface of a monocrystalline base, the electrically insulative material comprising one or more materials selected from the group consisting of silicon dioxide, silicon nitride, borophosphosilicate glass, and phosphosilicate glass;
an opening extending only partially into the electrically insulative material, the opening having a pair of vertically opposing sidewalls that each meet a bottom of the opening, the bottom of the opening extending across the width of the opening and being disposed above the surface of the monocrystalline base;
a barrier material liner lining and in direct contact with the electrically insulative material along sidewalls and bottom of the opening, the barrier material comprising at least one of titanium, tantalum and ruthenium;
a metal liner material over and directly contacting the barrier material liner along the sidewalls and bottom of the opening, the metal liner material consisting of metal and comprising tantalum alloyed with cobalt; and
copper-containing material within the opening and directly against the metal liner material.
2. The construction of claim 1 wherein the metal liner material further comprises ruthenium.
3. The construction of claim 1 wherein the electrically insulative material comprises silicon dioxide material.
4. A semiconductor construction, comprising:
an electrically insulative material directly on a surface of a monocrystalline base;
an opening extending only partially into the electrically insulative material, the opening having a pair of vertically opposing sidewalls that each meet a bottom of the opening, the bottom of the opening extending across the width of the opening and being disposed above the surface of the monocrystalline base;
a barrier material liner lining and in direct contact with the electrically insulative material along sidewalls and bottom of the opening, the barrier material comprising at least one of titanium, tantalum and ruthenium;
a metal liner material over and directly contacting the barrier material liner along the sidewalls and bottom of the opening, the metal liner material consisting metal and comprising tantalum alloyed with cobalt; and
copper-containing material within the opening and directly against the metal liner material.
5. The construction of claim 4 wherein the metal liner material further comprises ruthenium.
6. The construction of claim 4 wherein the barrier material comprises titanium nitride.
7. The construction of claim 4 wherein the barrier material comprises tantalum nitride.
8. The construction of claim 4 wherein the barrier material comprises both tantalum and ruthenium.
9. The construction of claim 4 wherein the barrier material comprises titanium oxide.
10. The construction of claim 4 wherein the copper-containing material consists essentially of copper.
11. A semiconductor construction, comprising:
an electrically insulative material directly on a surface of a monocrystalline base;
an opening extending only partially into the electrically insulative material, the opening having a pair of vertically opposing sidewalls that each meet a bottom of the opening, the bottom of the opening extending across the width of the opening and being disposed above the surface of the monocrystalline base;
a barrier material liner lining and in direct contact with the electrically insulative material along sidewalls and bottom of the opening, the barrier material comprising a member of the group consisting of TiN, Ta/Ru, Ta, and TiO;
a metal liner material over and directly contacting the barrier material liner along the sidewalls and bottom of the opening, the metal liner material being selected from the group consisting of tantalum alloyed with cobalt, tantalum allowed with cobalt and ruthenium, nitrogen in combination with cobalt, and nitrogen in combination with cobalt and ruthenium; and
copper-containing material within the opening and directly against the metal liner material.