Field effect transistors having a fin
Transistors might include first and second semiconductor fins, a first source/drain region in the first semiconductor fin and extending downward from an uppermost surface of the first semiconductor fin, a second source/drain region in the second semiconductor fin and extending downward from an uppermost surface of the second semiconductor fin, a dielectric between the first and second semiconductor fins and adjacent to sidewalls of the first and second semiconductor fins, and a control gate over the dielectric and between the first and second semiconductor fins and extending to a level below upper surfaces of the first and second source/drain regions.
1. A transistor, comprising:
a first semiconductor fin;
a second semiconductor fin having a first side adjacent a first side of the first semiconductor fin;
a third semiconductor fin adjacent a second side of the first semiconductor fin;
a fourth semiconductor fin adjacent a second side of the second semiconductor fin;
a first source/drain region in the first semiconductor fin and extending downward from an uppermost surface of the first semiconductor fin;
a second source/drain region in the second semiconductor fin and extending downward from an uppermost surface of the second semiconductor fin;
a first conductive region in the third semiconductor fin and extending downward from an uppermost surface of the third semiconductor fin;
a second conductive region in the fourth semiconductor fin and extending downward from an uppermost surface of the fourth semiconductor fin;
a dielectric between the first and second semiconductor fins and adjacent to sidewalls of the first and second semiconductor fins; and
a control gate over the dielectric and between the first and second semiconductor fins and extending to a level below upper surfaces of the first and second source/drain regions;
wherein the first semiconductor fin, the second semiconductor fin, the third semiconductor fin and the fourth semiconductor fin each have a first conductivity type;
wherein the first source/drain region and the second source/drain region each have a second conductivity type different than the first conductivity type; and
wherein the first conductive region and the second conductive region each have the first conductivity type.