Integrated circuit device and method of manufacturing the same
An integrated circuit device includes a device isolation trench defining an active area, a gate trench extending in a first direction across the active area and the device isolation film, a gate dielectric film covering an inner wall of the gate trench, and a conductive line filling a part of the gate trench above the gate dielectric film. The active area includes a fin body portion located under the conductive line, and a thinner fin portion protruding from the fin body portion toward the conductive line and having a width less than a width of the fin body portion in the first direction.
1. An integrated circuit device comprising:
a substrate having a device isolation trench that defines an active area;
a device isolation film filling the device isolation trench around the active area;
a gate trench extending in a first direction across the active area and the device isolation film;
a gate dielectric film covering an inner wall of the gate trench; and
a conductive line filling a part of the gate trench above the gate dielectric film,
wherein the active area comprises a fin body portion under the conductive line, a thinner fin portion protruding from the fin body portion toward the conductive line and having a first width less than a second width of the fin body portion in the first direction, an upper active area having an uppermost surface at a level higher than a top surface of the conductive line, and a middle active area connected between the fin body portion and the upper active area and having a third width less than the second width of the fin body portion and less than a fourth width of the upper active area in a horizontal direction.
2. The integrated circuit device of claim 1 , wherein the gate trench comprises a first bottom where the device isolation film is exposed and a second bottom where the thinner fin portion and the fin body portion are exposed, and
the first bottom is at a level lower than the second bottom.
3. The integrated circuit device of claim 1 , wherein the conductive line comprises a recess bottom that surrounds the thinner fin portion.
4. The integrated circuit device of claim 1 , wherein the active area has a side wall including a lateral recess at a same level as the thinner fin portion, and
the device isolation film has a side wall including a laterally protruding insulation portion that protrudes toward the lateral recess.
5. The integrated circuit device of claim 1 , wherein a lateral recess extending long in a horizontal direction is formed in a side wall of the active area.
6. The integrated circuit device of claim 1 , wherein the middle active area and the thinner fin portion are at a same level in the horizontal direction.
7. The integrated circuit device of claim 1 , wherein a side wall of the device isolation film includes a portion having a negative profile extending such that a width of the device isolation film in a horizontal direction decreases toward an uppermost surface of the active area.
8. The integrated circuit device of claim 1 , wherein a lateral recess extending in the horizontal direction is formed in a side wall of the active area, and the device isolation film has a side wall including a laterally protruding insulation portion that protrudes toward the lateral recess, and
wherein the device isolation film comprises a gap-fill insulating film and an insulating liner that surrounds the gap-fill insulating film,
the insulating liner comprising a protruding portion that protrudes toward the laterally protruding insulation portion.
9. An integrated circuit device comprising:
a substrate having a plurality of active areas that are arranged in a row in a first direction;
a device isolation film surrounding the plurality of active areas on the substrate; and
a conductive line extending across the plurality of active areas in the substrate,
wherein each of the plurality of active areas comprises a fin body portion under the conductive line, a thinner fin portion protruding from the fin body portion toward the conductive line and having a first width less than a second width of the fin body portion in the first direction, an upper active area having an uppermost surface at a level higher than a top surface of the conductive line, and a middle active area arranged between the upper active area and the fin body portion and having a third width less than the second width of the fin body portion and less than a fourth width of the upper active area in the first direction.
10. The integrated circuit device of claim 9 , wherein each of the plurality of active areas includes a gate trench that accommodates the conductive line, and
the gate trench has a bottom that is defined by a surface of the thinner fin portion and an upper surface of the fin body portion.
11. The integrated circuit device of claim 9 , wherein the device isolation film includes a gate trench that accommodates the conductive line, and
the gate trench has a bottom at a level lower than a level of the thinner fin portion.
12. The integrated circuit device of claim 9 , wherein a lateral recess extending long in a horizontal direction is formed in a side wall of each of the plurality of active areas.
13. The integrated circuit device of claim 12 , wherein the device isolation film includes a laterally protruding insulation portion that protrudes toward the lateral recess.
14. An integrated circuit device comprising:
a substrate having a cell array area, a peripheral circuit area, and an interface area between the cell array area and the peripheral circuit area;
a plurality of active areas in the substrate in the cell array area;
a device isolation film covering a side wall of each of the plurality of active areas in the cell array area;
an interface device isolation film filling an interface trench formed in the substrate in the interface area; and
a plurality of conductive lines extending in the cell array area across the plurality of active areas in a first direction,
wherein each of the plurality of active areas comprises a fin body portion located under the conductive line, a thinner fin portion protruding from the fin body portion toward the conductive line and having a first width less than a second width of the fin body portion in the first direction, an upper active area having an uppermost surface at a level higher than a top surface of the plurality of conductive lines, and a middle active area connected between the fin body portion and the upper active area and having a third width less than the second width of the fin body portion and less than a fourth width of the upper active area in the first direction.
15. The integrated circuit device of claim 14 , wherein the conductive line comprises a first portion facing the thinner fin portion, a second portion facing an upper surface of the fin body portion, and a third portion facing the device isolation film.
16. The integrated circuit device of claim 14 , wherein each of the plurality of active areas has a side wall in which a lateral recess is formed, the lateral recess extending long in a horizontal direction at a same level as a level of the thinner fin portion.
17. The integrated circuit device of claim 14 , wherein the device isolation film has a side wall on which a laterally protruding insulation portion is located, the laterally protruding insulation portion extending long in a horizontal direction at a same level as a level of the thinner fin portion.