IP Library Granted Patent US 10,804,273
Granted Patent B2
US 10,804,273 · App. 16/119,835 · Granted Oct 13, 2020

Memory arrays comprising vertically-alternating tiers of insulative material and memory cells and methods of forming a memory array

Inventor: Durai Vishak Nirmal Ramaswamy (Boise, ID)
Assignee: Micron Technology, Inc.
H01L27/1052G11C11/221G11C11/223G11C11/24H01L27/0688H01L27/10805H01L27/10829G11C5/02H01L27/11514H01L27/11597
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Quick Facts
Patent No.
US 10,804,273
App. No.
16/119,835
Granted
Oct 13, 2020
Kind
B2
Abstract

A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. The capacitor comprises a first electrode electrically coupled to a source/drain region of the transistor. The first electrode comprises an annulus in a straight-line horizontal cross-section and a capacitor insulator radially inward of the first electrode annulus. A second electrode is radially inward of the capacitor insulator. A capacitor-electrode structure extends elevationally through the vertically-alternating tiers. Individual of the second electrodes of individual of the capacitors are electrically coupled to the elevationally-extending capacitor-electrode structure. A sense line is electrically coupled to another source/drain region of multiple of the transistors that are in different memory-cell tiers. Additional embodiments and aspects are disclosed, including methods.

Claims (34)

1. A memory array comprising vertically-alternating tiers of insulative material and memory cells, the memory cells individually comprising a transistor and a capacitor disposed horizontally relative to each other within the tiers of memory cells, the capacitor comprising:

a first electrode electrically coupled to a source/drain region of the transistor, the first electrode being disposed at an elevation over a substrate equivalent to an elevation over the substrate of a channel region of the transistor, the first electrode comprising an annulus in a straight-line horizontal cross-section;

a capacitor insulator radially inward of the first electrode annulus; and

a second electrode radially inward of the capacitor insulator; and

a capacitor-electrode structure extending elevationally through multiple of the vertically-alternating tiers, individual of the second electrodes of individual capacitors being electrically coupled to the elevationally-extending capacitor-electrode structure; and

a sense line electrically coupled to another source/drain region of multiple transistors that are in different memory-cell tiers.

2. The array of claim 1 wherein the capacitor-electrode structure comprises a pillar.

3. The array of claim 1 wherein the capacitor insulator extends elevationally through the vertically-alternating tiers.

4. The array of claim 1 wherein the capacitor insulator comprises an annulus in a straight-line horizontal cross-section.

5. The array of claim 4 wherein the capacitor insulator extends elevationally through the vertically-alternating tiers.

6. The array of claim 1 wherein the second electrode is not annular in any straight-line horizontal cross-section.

7. The array of claim 1 wherein the capacitor-electrode structure is not annular in any straight-line horizontal cross-section.

8. The array of claim 1 wherein the capacitor-electrode structure extends vertically or within 10° of vertical.

9. The array of claim 1 wherein the sense line comprises a sense-line structure extending elevationally through the vertically-alternating tiers, individual of the second source/drain regions of individual transistors that are in different memory-cell tiers being electrically coupled to the elevationally-extending sense-line structure.

10. The array of claim 9 wherein the sense-line structure comprises a pillar.

11. The array of claim 9 wherein the sense line comprises a horizontal longitudinally-elongated conductive line that is above or below the vertically-alternating tiers and is directly electrically coupled to the sense-line structure.

12. The array of claim 1 wherein the capacitor-electrode structure is directly electrically coupled to a horizontally-elongated capacitor-electrode construction that is above or below the vertically-alternating tiers.

13. The array of claim 1 wherein,

the sense line comprises a sense-line structure extending elevationally through the vertically-alternating tiers, individual of the second source/drain regions of individual transistors being electrically coupled to the elevationally-extending sense-line structure;

the sense line comprises a horizontal longitudinally-elongated conductive line that is above the vertically-alternating tiers and is directly electrically coupled to the sense-line structure; and

the capacitor-electrode structure is directly electrically coupled to a horizontally-elongated capacitor-electrode construction that is above the vertically-alternating tiers and below the horizontal longitudinally-elongated conductive line.

14. A memory array, comprising:

vertically-alternating tiers of insulative material and memory cells, the memory cells individually comprising:

a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region, at least a portion of the channel region being horizontally-oriented for horizontal current flow in the at least a portion between the first and second source/drain regions; and

a capacitor disposed horizontally relative to the transistor, the capacitor comprising:

a first electrode electrically coupled to the first source/drain region of the transistor, the first electrode being disposed at an elevation over a substrate equivalent to an elevation over the substrate of the channel region and comprising an annulus in a straight-line horizontal cross-section;

a capacitor insulator radially inward of the first electrode annulus; and

a second electrode radially inward of the capacitor insulator;

a capacitor-electrode structure extending elevationally through the vertically-alternating tiers, the second electrode of individual of the capacitors comprising a portion of the elevationally-extending capacitor-electrode structure; and

a sense-line structure extending elevationally through the vertically-alternating tiers, individual of the second source/drain regions of individual transistors that are in different memory-cell tiers being electrically coupled to the elevationally-extending sense-line structure.

15. The array of claim 14 wherein all of the channel region is horizontally-oriented for horizontal current flow there-through.

16. The array of claim 14 wherein the first electrode is directly electrically coupled to the first source/drain region.

17. The array of claim 14 wherein the sense-line structure is directly electrically coupled to a horizontal longitudinally-elongated sense line that is above or below the vertically-alternating tiers.

18. The array of claim 14 wherein the capacitor-electrode structure is directly electrically coupled to a horizontally-elongated capacitor-electrode construction that is above or below the vertically-alternating tiers.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 14, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 051028/0835 →
RELEASE OF SECURITY INTEREST Recorded Oct 14, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050719/0550 →
SUPPLEMENT NO. 1 TO PATENT SECURITY AGREEMENT Recorded Nov 13, 2018
From: MICRON TECHNOLOGY, INC.
To: JPMORGAN CHASE BANK, N.A.., AS COLLATERAL AGENT
Reel/Frame 047630/0756 →
SUPPLEMENT NO. 10 TO PATENT SECURITY AGREEMENT Recorded Nov 13, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 048102/0420 →
Cited By (2)
US 12,213,302 US 12,507,394