IP Library Granted Patent US 10,923,205
Granted Patent B2
US 10,923,205 · App. 16/119,850 · Granted Feb 16, 2021

Memory devices comprising magnetic tracks individually comprising a plurality of magnetic domains having domain walls and methods of forming a memory device comprising magnetic tracks individually comprising a plurality of magnetic domains having domain walls

Inventors: Livio Baldi (Agrate Brianza, IT); Marcello Mariani (Milan, IT)
Assignee: Micron Technology, Inc.
G11C19/0808G11C11/161G11C11/1675H01L43/02H01L43/12G11B5/4946G11C11/14
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Quick Facts
Patent No.
US 10,923,205
App. No.
16/119,850
Granted
Feb 16, 2021
Kind
B2
Abstract

A method of forming a memory device having magnetic tracks individually comprising a plurality of magnetic domains having domain walls, includes forming an elevationally outer substrate material of uniform chemical composition. The uniform composition material is partially etched into to form alternating regions of elevational depressions and elevational protrusions in the uniform composition material. A plurality of magnetic tracks is formed over and which angle relative to the alternating regions. Interfaces of immediately adjacent of the regions individually form a domain wall pinning site in individual of the magnetic tracks. Other methods, including memory devices independent of method, are disclosed.

Claims (16)

1. A method of forming a memory device comprising magnetic tracks individually comprising a plurality of magnetic domains having domain walls, comprising:

forming an elevationally outermost substrate material of uniform chemical composition that has multiple physical differences therein, the multiple physical differences being characterized by one of (a) and (b), where,

(a): amorphous regions and crystalline regions;

(b): crystalline regions of different lattice configurations;

etching only partially elevationally into the material of uniform chemical composition having multiple physical differences therein to form the material of uniform chemical composition having multiple physical differences therein to have alternating regions of elevational depressions and elevational protrusions in a finished construction of the memory device; and

forming a plurality of magnetic tracks over and which angle relative to the alternating regions, interfaces of immediately adjacent of the alternating regions individually comprising a domain wall pinning site in individual of the magnetic tracks.

2. The method of claim 1 wherein the alternating regions have outer surfaces which are horizontal or within 10° of horizontal.

3. The method of claim 1 wherein the composition is dielectric.

4. The method of claim 3 wherein the composition comprises at least one of silicon dioxide and silicon nitride.

5. The method of claim 1 wherein magnetic material of the magnetic tracks is not formed directly against the elevationally outermost substrate material.

6. The method of claim 5 comprising an electrically conductive material between the elevationally outermost substrate material and the magnetic tracks.

7. The method of claim 1 wherein magnetic material of the magnetic tracks is not elevationally within the depressions.

8. The method of claim 1 wherein the alternating regions form elongated parallel trenches and mesas.

9. The method of claim 1 comprising (a): amorphous regions and crystalline regions.

10. The method of claim 1 comprising (b): crystalline regions of different lattice configurations.

11. The method of claim 1 wherein the elevationally outermost substrate material has a thickness of from about 30 nanometers to about 1 micron.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 14, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 051028/0835 →
RELEASE OF SECURITY INTEREST Recorded Oct 14, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050719/0550 →
SUPPLEMENT NO. 1 TO PATENT SECURITY AGREEMENT Recorded Nov 13, 2018
From: MICRON TECHNOLOGY, INC.
To: JPMORGAN CHASE BANK, N.A.., AS COLLATERAL AGENT
Reel/Frame 047630/0756 →
SUPPLEMENT NO. 10 TO PATENT SECURITY AGREEMENT Recorded Nov 13, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 048102/0420 →
Continuity (3)
Continuation 14701870 · May 1, 2015
Division 13906857 · May 31, 2013
Related Publication 20190019566A1 · Jan 17, 2019