Organic EL display panel including a multilayer sealing layer, organic EL display device, and manufacturing method thereof

1. An organic electroluminescence (EL) display panel, comprising:

a substrate;

a plurality of organic EL elements;

an electrode; and

a sealing layer in this order, wherein the sealing layer has a three-layered structure in the order of a first sealing layer, a second sealing layer, and a third sealing layer, and the first sealing layer directly contacts the electrode,

the first sealing layer, the second sealing layer, and the third sealing layer each include amorphous silicon nitride, and

wherein composition of the first sealing layer, composition of the second sealing layer, and composition of the third sealing layer are each indicated as SiN x , and wherein a value of x in the composition of the second sealing layer is greater than both a value of x in the composition of the first sealing layer and a value of x in the composition of the third sealing layer.

2. The organic EL display panel of claim 1 , wherein

the second sealing layer has a smaller refractive index than the first sealing layer and the third sealing layer.

3. The organic EL display panel of claim 2 , wherein

the refractive index of the second sealing layer is from 1.60 to 1.78.

4. The organic EL display panel of claim 1 , wherein

the first sealing layer and the third sealing layer have substantially the same refractive indices.

5. The organic EL display panel of claim 1 , wherein

the first sealing layer, the second sealing layer, and the third sealing layer are in an atmosphere of the same temperature and the same humidity, a material of the second sealing layer has greater reactivity in a reaction of absorbing oxygen from moisture in the atmosphere than both a material of the first sealing layer and a material of the third sealing layer.

6. The organic EL display panel of claim 5 , wherein

the third sealing layer has a flaw,

a portion of the second sealing layer corresponding to the flaw of the third sealing layer is exposed to air, and

a ratio of a number of oxygen atoms to a number of silicon atoms is greater in the second sealing layer than in the first sealing layer and in the third sealing layer.

7. The organic EL display panel of claim 1 , wherein x is greater than 1 for each of the first sealing layer, the second sealing layer and the third sealing layer.

8. The organic EL display panel of claim 1 , wherein the second sealing layer is thicker than the third sealing layer.

9. The organic EL display panel of claim 1 , wherein a refractive index of each of the first sealing layer and the third sealing layer is less than 1.9.

10. The organic EL display panel of claim 1 , wherein a refractive index of the first sealing layer ranges from 1.8 to 1.9.

11. The organic EL display panel of claim 1 , wherein the second sealing layer contains more oxygen than each of the first sealing layer and the third sealing layer.

12. The organic EL display panel of claim 1 , wherein the sealing layer consists of the first sealing layer, the second sealing layer and the third sealing layer.

13. An organic electroluminescence (EL) display panel, comprising:

a substrate;

a plurality of organic EL elements;

an impurity;

an electrode; and

a sealing layer in this order, wherein the sealing layer has a three-layered structure in the order of a first sealing layer, a second sealing layer, and a third sealing layer, the first sealing layer directly contacts the electrode, and a flaw exists in a portion of the third sealing layer directly above the impurity,

the first sealing layer, the second sealing layer, and the third sealing layer each include amorphous silicon nitride, the first sealing layer having a composition SiNx, the second sealing layer having a composition SiNy, and y is greater than x, and

wherein the first sealing layer, the second sealing layer, and the third sealing layer are in an atmosphere of the same temperature and the same humidity, a material of the second sealing layer has greater reactivity in a reaction of absorbing oxygen from moisture in the atmosphere than both a material of the first sealing layer and a material of the third sealing layer.

14. The organic EL display panel of claim 13 , wherein

a portion of the second sealing layer corresponding to the flaw of the third sealing layer is exposed to air, and

a ratio of a number of oxygen atoms to a number of silicon atoms is greater in the second sealing layer than in the first sealing layer and in the third sealing layer.

15. The organic EL display panel of claim 13 , wherein the second sealing layer is thicker than the third sealing layer.

16. The organic EL display panel of claim 13 , wherein a refractive index of each of the first sealing layer and the third sealing layer is less than 1.9.

17. The organic EL display panel of claim 13 , wherein a refractive index of the second sealing layer ranges from 1.6 to 1.78.

18. The organic EL display panel of claim 13 , wherein each of the first sealing layer, the second sealing layer and the third sealing layer has a nitrogen concentration greater than a stoichiometric ratio of silicon nitride.

19. An organic electroluminescence (EL) display device comprising:

an organic EL display panel, comprising:

a substrate;

a plurality of organic EL elements;

an electrode; and

a sealing layer in this order, wherein the sealing layer has a three-layered structure in the order of a first sealing layer, a second sealing layer, and a third sealing layer, and the first sealing layer directly contacts the electrode,

the first sealing layer, the second sealing layer, and the third sealing layer each include amorphous silicon nitride, and

wherein composition of the first sealing layer, composition of the second sealing layer, and composition of the third sealing layer are each indicated as SiN x , and wherein a value of x in the composition of the second sealing layer is greater than both a value of x in the composition of the first sealing layer and a value of x in the composition of the third sealing layer.

20. An organic electroluminescence (EL) display device comprising:

an organic EL display panel comprising:

a substrate;

a plurality of organic EL elements;

an electrode;

an impurity, wherein a dimension of the impurity parallel to a top surface of the substrate is less than a dimension of an organic EL element of the plurality of organic EL elements parallel to the top surface of the substrate; and

a sealing layer in this order, wherein the sealing layer has a three-layered structure in the order of a first sealing layer, a second sealing layer, and a third sealing layer, a portion of the second sealing layer is exposed to air, the first sealing layer directly contacts the electrode, and the portion of the second sealing layer is directly above the impurity,

the first sealing layer, the second sealing layer, and the third sealing layer each include amorphous silicon nitride, the third sealing layer having a composition SiNx, the second sealing layer having a composition SiNy, and y is greater than x, and

wherein the first sealing layer, the second sealing layer, and the third sealing layer are in an atmosphere of the same temperature and the same humidity, a material of the second sealing layer has greater reactivity in a reaction of absorbing oxygen from moisture in the atmosphere than both a material of the first sealing layer and a material of the third sealing layer.