Interconnect structures with intermetallic palladium joints and associated systems and methods
View Patent ↗Interconnect structures with intermetallic palladium joints are disclosed herein. In one embodiment, a method of forming an interconnect structure includes depositing a first conductive material comprising nickel on a first conductive surface of a first die, and depositing a second conductive material comprising nickel on a second conductive surface of a second die spaced apart from the first surface. The method further includes depositing a third conductive material on the second conductive material, and thermally compressing tin/solder between the first and third conductive materials to form an intermetallic palladium joint that extends between the first conductive material and the second conductive material such that one end of the intermetallic palladium joint is bonded directly to the first conductive material and an opposite end of the intermetallic palladium joint is bonded directly to the second conductive material.
1. An interconnect structure, comprising:
a first conductive element;
a second conductive element; and
an intermetallic palladium joint having a thickness between the first and second conductive elements, the intermetallic palladium joint comprising intermetallic crystallites in which each intermetallic crystallite has a first end portion directly contacting the first conductive element, and a second end portion directly contacting the second conductive element, wherein each intermetallic crystallite has palladium spanning the thickness of the intermetallic palladium joint between the first and second conductive elements.
2. The interconnect structure of claim 1 wherein the thickness of the intermetallic palladium joint is in a range between about 5 μm to 10 μm.
3. The interconnect structure of claim 1 , further comprising a first barrier material on the first conductive element, the first barrier material bonding the first end portion of each of the crystallites to the first conductive element, and wherein the intermetallic palladium joint includes a plurality of intermetallic features that each comprise palladium.
4. The interconnect structure of claim 3 , further comprising a second barrier material on the second conductive element, the second barrier material bonding the second end portion of each of the crystallites to the second conductive element.
5. The interconnect structure of claim 4 wherein the first and second barrier materials comprise nickel.
6. The interconnect structure of claim 1 wherein the first and second conductive elements comprise copper.
7. A semiconductor device, comprising:
a first semiconductor die;
a second semiconductor die; and
interconnect structures between the first and second semiconductor dies, wherein each interconnect structure includes, a first conductive element, a second conductive element, and an intermetallic joint between the first conductive element and the second conductive element, wherein the intermetallic joint includes a plurality of intermetallic features that each form a conductive bond between the first conductive element and the second conductive element, wherein each of the intermetallic features is composed of a discrete volume of palladium that forms a first end portion directly coupled to the first conductive element and a second end portion directly coupled to the second conductive element.
8. The semiconductor device of claim 7 wherein each intermetallic joint includes a first nickel material bonding the first end portion to the first conductive element and a second nickel material bonding the second end portion to the second conductive element.
9. The semiconductor device of claim 8 wherein the intermetallic joint includes tin between individual intermetallic features such that the intermetallic joint includes palladium, nickel and tin.
10. The semiconductor device of claim 7 wherein at least one of the first and second conductive elements comprises a bond pad.
11. The semiconductor device of claim 7 wherein at least one of the first and second conductive elements comprises a conductive trace.
12. The semiconductor device of claim 7 wherein at least one of the first and second conductive elements comprises a conductive pillar attached to a bond pad or a conductive trace.