Water level sequencing flow cell fabrication
A method for forming sequencing flow cells can include providing a semiconductor wafer covered with a dielectric layer, and forming a patterned layer on the dielectric layer. The patterned layer has a differential surface that includes alternating first surface regions and second surface regions. The method can also include attaching a cover wafer to the semiconductor wafer to form a composite wafer structure including a plurality of flow cells. The composite wafer structure can then be singulated to form a plurality of dies. Each die forms a sequencing flow cell. The sequencing flow cell can include a flow channel between a portion of the patterned layer and a portion of the cover wafer, an inlet, and an outlet. Further, the method can include functionalizing the sequencing flow cell to create differential surfaces.
1. A method for forming sequencing flow cells, comprising:
providing a semiconductor wafer covered with a dielectric layer;
forming a patterned layer on the dielectric layer, the patterned layer having differential surface regions that include first surface regions and second surface regions, wherein the first surface regions are hydrophilic surfaces and the second surface regions are hydrophobic surfaces;
attaching a cover wafer to the semiconductor wafer to form a composite wafer structure that includes a plurality of sequencing flow cells, wherein each sequencing flow cell includes:
a flow channel between the patterned layer and the cover wafer;
one or more first surface regions in the patterned layer;
one or more second surface regions in the patterned layer; and
an inlet and an outlet coupled to the flow channel; and
singulating the composite wafer structure to form a plurality of dies, each die including a sequencing flow cell.
2. The method of claim 1 , further comprising forming inlets and outlets in the cover wafer before attaching the cover wafer to the semiconductor wafer.
3. The method of claim 1 , wherein the semiconductor wafer further comprises a CMOS layer underlying the dielectric layer.
4. The method of any of claim 1 , wherein forming a patterned layer comprises:
forming a metal oxide layer overlying the dielectric layer on the semiconductor wafer; and
patterning the metal oxide layer into a plurality of metal oxide regions,
wherein the metal oxide regions are configured to receive nucleic acid macromolecules.
5. The method of claim 1 , further comprising forming a support structure on the semiconductor wafer before attaching the cover wafer to the semiconductor wafer.
6. The method of claim 5 , further comprising bonding the cover wafer to the support structure.
7. The method of claim 1 , wherein the cover wafer comprises a glass wafer.
8. The method of claim 1 , further comprising functionalizing the sequencing flow cell, wherein functionalizing the sequencing flow cell comprises exposing the flow channel to materials supplied through the inlet and outlet.
9. The method of claim 1 , wherein singulating the composite wafer structure comprises separating the composite wafer structure into individual dies using a wafer cutting process.
10. A method for forming sequencing flow cells, comprising:
providing a semiconductor wafer covered with a dielectric layer;
forming a patterned layer on the dielectric layer, the patterned layer having differential surface regions that include first surface regions and second surface regions;
attaching a cover wafer to the semiconductor wafer to form a composite wafer structure that includes a plurality of sequencing flow cells, wherein each sequencing flow cell includes:
a flow channel between the patterned layer and the cover wafer;
one or more first surface regions in the patterned layer;
one or more second surface regions in the patterned layer; and
an inlet and an outlet coupled to the flow channel; and
singulating the composite wafer structure to form a plurality of dies, each die including a sequencing flow cell;
wherein the first surface regions are hydrophobic surfaces and the second surface regions are hydrophilic surfaces.
11. A method for forming sequencing flow cells, comprising:
providing a semiconductor wafer having a dielectric layer overlying a complementary metal-oxide-semiconductor (CMOS) layer, wherein the CMOS layer includes:
a photo sensing layer, the photo sensing layer including a plurality of photodiodes;
an electronic circuit layer coupled to the photo sensing layer for processing sensed signals; and
forming a patterned layer on the dielectric layer, the patterned layer having metal oxide regions and silicon oxide regions;
attaching a glass wafer to the semiconductor wafer to form a composite wafer structure, the glass wafer including a plurality of holes and the composite wafer structure including a plurality of sequencing flow cells, wherein each sequencing flow cell includes:
a glass layer having holes configured as an inlet and an outlet of the sequencing flow cell;
multiple metal oxide regions and silicon oxide regions; and
a flow channel between the glass layer and the multiple metal oxide regions and silicon oxide regions; and
singulating the composite wafer structure to form a plurality of dies, each die including a sequencing flow cell.
12. The method of claim 11 , wherein forming a patterned layer comprises:
forming a metal oxide layer overlying the dielectric layer on the semiconductor wafer; and
patterning the metal oxide layer into a plurality of metal oxide regions,
wherein the metal oxide regions are configured to receive nucleic acid macromolecules.
13. The method of claim 11 , wherein forming a patterned layer comprises:
forming a metal oxide layer;
forming a silicon oxide layer overlying the metal oxide layer; and
patterning the silicon oxide layer,
wherein regions of the metal oxide layer not covered by the silicon oxide layer are configured to receive a nucleic acid macromolecule.
14. The method of claim 11 , further comprising bonding the glass wafer to the semiconductor wafer.
15. The method of claim 11 , further comprising functionalizing the sequencing flow cell, wherein functionalizing the sequencing flow cell comprises exposing the sequencing flow cell to materials supplied through the inlet and outlet.