Back end of line process integrated optical device fabrication

1. A method of integrated optical device fabrication forming an optical device within a vertical span of a metal stack of an integrated semiconductor chip as part of a back end of line fabrication process, comprising:

providing a substrate;

providing a device layer including at least one optical device on the substrate;

depositing a first oxide layer over the semiconductor devices;

forming a first metal via through the first oxide layer into contact with the device layer;

depositing a second oxide layer comprising an oxide material over the first oxide layer;

etching a first portion of the second oxide layer;

depositing metal in the first portion of the second oxide layer for connection with the first metal via and external contacts;

forming a second portion of the second oxide layer into a first waveguide for coupling light to or from the at least one optical device.

2. The method according to claim 1 , further comprising:

depositing a third oxide layer over the second oxide layer;

forming a second metal via through the third oxide layer into contact with the device layer;

depositing a fourth oxide layer of the third oxide layer;

etching a first portion of the fourth oxide layer;

depositing metal in the first portion of the fourth oxide layer for connection with the second metal via and external contacts; and

forming a second portion of the fourth oxide layer into a second waveguide for coupling light to or from the at least one optical device via the first waveguide.

3. The method according to claim 1 , wherein forming a second portion of the second oxide layer comprises doping the oxide material to form a doped first waveguide.

4. The method according to claim 3 , wherein doping the oxide material comprises doping utilizing at least one of ion implantation and diffusion.

5. The method according to claim 4 , wherein the doping utilizes a material comprising at least one of B, F, Al, Ti, As, P, Er, Ni, Si, Cu, Zn, Ge, N, Zr, Nd, and Yb.

6. The method according to claim 4 , wherein the doping utilizes a material comprising phosphorous.

7. The method according to claim 1 , further comprising forming a first etch stop layer between the first and second oxide layers; wherein etching a first portion of the second oxide layer comprises etching down to the first etch stop layer.

8. A method of integrated optical device fabrication forming an optical device within a vertical span of a metal stack of an integrated semiconductor chip as part of a back end of line fabrication process, comprising:

providing a substrate;

providing a device layer including at least one integrated optical device on the substrate;

depositing a first oxide layer over the semiconductor devices;

forming a first metal via through the first oxide layer into contact with the device layer;

depositing a first stop layer over the first oxide layer;

depositing a second oxide layer comprising an oxide material over the first stop layer;

etching a first portion of the second oxide layer down to the first stop layer;

depositing metal in the first portion of the second oxide layer for connection with the first metal via and external contacts;

forming a portion of the first stop layer into a first waveguide for coupling light to or from the at least one integrated optical device.

9. The method according to claim 8 , further comprising:

depositing a second stop layer over the second oxide layer;

depositing a third oxide layer over the second stop layer;

forming a first portion of the second stop layer into a second waveguide forming a vertical coupler with the first waveguide for coupling light to or from the at least one integrated optical device.

10. The method according to claim 9 , further comprising forming an edge coupler in another portion of the second stop layer for coupling light from an external waveguide to the at least one integrated optical device via the vertical coupler.

11. The method according to claim 9 , wherein the first and second waveguides comprises inverse tapered waveguides.

12. The method according to claim 9 , further comprising:

forming a portion of the third oxide layer into an optical device optically coupled to the vertical coupler.

13. The method according to claim 12 , wherein the optical device comprises a multimode interference coupler.

14. The method according to claim 12 , wherein forming the second portion of the second oxide layer comprises depositing the second portion at a lower deposition rate than surrounding oxide providing denser material with a higher refractive index.

15. The method according to claim 12 , wherein forming the second portion of the second oxide layer comprises chemical vapor deposition of a compatible material into the second portion.

16. The method according to claim 9 , further comprising:

depositing a third stop layer over the third oxide layer; and

forming a portion of the third stop layer into an optical device optically coupled to the vertical coupler.

17. The method according to claim 16 , further comprising:

forming a second metal via through the third oxide layer down to the device layer;

depositing a fourth oxide layer over the third stop layer;

etching a first portion of the third oxide layer down to the third stop layer; and

depositing metal in the first portion of the third oxide layer for connection with the second metal via and external contacts.

18. The method according to claim 16 , wherein the optical device comprises an arrayed waveguide grating (AWG) for coupling light to or from an external waveguide to the at least one integrated optical device in the device layer.

19. The method according to claim 17 , wherein the AWG is more than 4 micrometers from the at least one integrated optical device.

20. An integrated semiconductor device, comprising:

a substrate;

a device layer on the substrate;

a first oxide layer over the device layer;

a second oxide layer over the first oxide layer;

a third oxide layer over the second oxide layer;

a fourth oxide layer over the third oxide layer;

a fifth oxide layer over the fourth oxide layer

a metal stack for connection with external contacts, including a first metal portion in a first portion of the second oxide layer extending between the first and third oxide layers, and a first metal via extending between the first metal portion and the device layer, and a second metal portion in a first portion of the fourth oxide layer extending between the third and fifth oxide layers, and a second metal via extending between the second metal portion and the device layer;

an optical coupler including a first waveguide in a second portion of the third oxide layer, and a second waveguide in a second portion of the fifth oxide layer for coupling light to or from the at least one device layer.