Y-theta table for semiconductor equipment
A positioning table, for example for a wire bonder has first and second arms, each of said first and second arms being independently drivable linearly along a first axis, and a stage that is engaged with both the first and second arms. The stage engages with each of the first and second arms via a respective engagement mechanism such that the stage is movable both linearly along the first axis, and rotatable about a rotary axis coincident with a center-point of the stage, the rotary axis being orthogonal to the first axis. Each engagement mechanism is configured to permit a respective distance between the center-point of the stage and an end of each of the first and second arms to vary during movement of an arm along the first axis.
1. A positioning table for use in semiconductor equipment, comprising:
first and second arms, each of said first and second arms being independently drivable with a component of movement along a direction parallel to a first axis; and
a stage, engaged with both the first and second arms;
wherein the stage is connected to each of the first and second arms via a respective engagement mechanism such that the stage is movable both linearly in a direction parallel to the first axis, and rotatably about a rotary axis being substantially orthogonal to the first axis,
wherein each engagement mechanism comprises a respective hinge,
wherein each hinge comprises first and second beams, and
wherein each of said first and second beams is connected at a first end thereof to a respective arm of one of the first or second arms, and at a second, distal end thereof to the stage.
2. The positioning table of claim 1 , further comprising:
first and second linear motors for linearly driving the first and second arms respectively;
wherein each engagement mechanism is configured to permit rotation of the stage relative to a respective linear motor in a such a way that a point A of the stage will move along the first axis (Y) as: Y A =theta*R, where theta is an angle of rotation of the stage about the rotary axis in radians and R is a distance between a center of the engagement mechanism and point A.
3. The positioning table of claim 1 , wherein each engagement mechanism is configured to permit a respective distance between the rotary axis and an end of each of the first and second arms to vary during driving of an arm along the direction parallel to the first axis.
4. The positioning table of claim 1 , wherein the stage is linearly movable along the first axis when the first and second arms are driven in the same direction along the first axis.
5. The positioning table of claim 1 , wherein the stage is rotatably movable about the rotary axis when the arms are driven at different velocities along the first axis.
6. The positioning table of claim 1 , wherein the stage is connected to the first and second arms at diametrically opposed sections of the stage.
7. The positioning table of claim 1 , wherein the first and second beams of each hinge are arranged in a crossed configuration, such that the first and second beams are non-parallel and have adjacent, overlying portions.
8. The positioning table of claim 7 , wherein each beam is non-flexible and has a discrete pivot at each end, such that the hinge comprises a four-bar linkage.
9. The positioning table of claim 7 , wherein each beam comprises a flexure element, such that the hinge comprises a cross-pivot flexure.
10. The positioning table of claim 9 , wherein each flexure element comprises a leaf-spring.
11. The positioning table of claim 10 , wherein each leaf-spring comprises a reinforcement element located at a midsection of the respective leaf-spring, for increasing the rigidity of the respective leaf-spring.
12. The positioning table of claim 1 , comprising first and second actuators, for respectively driving the first and second arms along the first axis.
13. A wire bonder comprising the positioning table of claim 1 , and a bondhead mounted on the stage of the table.
14. A wire bonder, comprising:
first and second arms, each of said first and second arms being independently drivable with a component of movement along a direction parallel to a first axis; and
a stage, engaged with both the first and second arms;
wherein the stage is connected to each of the first and second arms via a respective engagement mechanism such that the stage is movable both linearly in a direction parallel to the first axis, and rotatably about a rotary axis being substantially orthogonal to the first axis,
wherein each engagement mechanism comprises a respective hinge,
wherein each hinge comprises first and second beams, and
wherein each of said first and second beams is connected at a first end thereof to a respective arm of one of the first or second arms, and at a second, distal end thereof to the stage.