IP Library Granted Patent US 11,062,923
Granted Patent B2
US 11,062,923 · App. 16/146,833 · Granted Jul 13, 2021

Apparatus to control transfer parameters during transfer of semiconductor devices

Inventors: Justin Wendt (Post Falls, ID); Cody Peterson (Hayden, ID); Andrew Huska (Liberty Lake, WA)
Assignee: Rohinni, LLC
H01L21/67132H01L21/677H01L21/67144H01L21/6836H01L24/75H01L33/48H01L2221/68363H01L2221/68386H01L2224/75262H01L2224/75303H01L2224/75804H01L2224/75824Y10T29/53174
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Quick Facts
Patent No.
US 11,062,923
App. No.
16/146,833
Granted
Jul 13, 2021
Kind
B2
Abstract

An apparatus includes a transfer mechanism to transfer an electrically-actuatable element directly from a wafer tape to a transfer location on a circuit trace on a product substrate. The transfer mechanism includes one or more transfer wires. Two or more stabilizers disposed on either side of the one or more transfer wires. A needle actuator is connected to the one or more transfer wires and the two or more stabilizers to move the one or more transfer wires and the two or more stabilizers to a die transfer position.

Claims (13)

1. An apparatus for executing a direct transfer of one or more semiconductor device die from a wafer tape to a substrate, the apparatus comprising:

a first frame configured to hold the wafer tape;

a second frame configured to secure the substrate such that a transfer surface is disposed facing the one or more semiconductor device die disposed on a first side of the wafer tape;

one or more transfer wires disposed adjacent a second side of the wafer tape opposite the first side, a length of the one or more transfer wires extending in a direction toward the wafer tape;

one or more stabilizers disposed adjacent the second side of the wafer tape, a length of the one or more stabilizers extending in a direction toward the wafer tape; and

a needle actuator configured to actuate the one or more transfer wires and the one or more stabilizers into a die transfer position at which at least one transfer wire and at least one stabilizer press on the second side of the wafer tape to press a semiconductor device die of the one or more semiconductor device die into contact with the transfer surface of the substrate.

2. The apparatus according to claim 1 , wherein the apparatus includes two or more stabilizers.

3. The apparatus according to claim 2 , wherein the needle actuator is configured to actuate the two or more stabilizers independently and simultaneously.

4. The apparatus according to claim 1 , wherein the needle actuator is configured to actuate the one or more transfer wires and the one or more stabilizers in a first direction, the first direction being toward the wafer tape.

5. The apparatus according to claim 4 , wherein the needle actuator is configured to actuate the one or more transfer needles and the one or more stabilizers concurrently in the first direction and sequentially in a second direction, the second direction being opposite the first direction.

6. The apparatus according to claim 1 , wherein the needle actuator includes an electromechanical actuator.

7. The apparatus according to claim 1 , wherein the apparatus further comprises a vacuum unit disposed adjacent the second side of the wafer tape, the vacuum unit being configured to engage during at least a portion of the direct transfer of the one or more semiconductor device die, wherein the vacuum unit is configured to remain engaged until the semiconductor device die is released from the wafer tape.

8. The apparatus according to claim 7 , wherein the vacuum unit is configured to minimize oscillation of the wafer tape during the direct transfer.

Assignments (4)
COURT ORDER Recorded May 15, 2024
From: ROHINNI, INC.
To: COWLES SEMI, LLC
Reel/Frame 067426/0706 →
LICENSE Recorded Jan 12, 2024
From: ROHINNI INC.
To: MAGNA ELECTRONICS, INC.
Reel/Frame 066286/0270 →
SECURITY INTEREST Recorded Jul 27, 2023
From: ROHINNI, INC.
To: COWLES COMPANY
Reel/Frame 064417/0238 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 18, 2019
From: WENDT, JUSTIN; HUSKA, ANDREW; PETERSON, CODY
To: ROHINNI, LLC
Reel/Frame 048098/0344 →
Continuity (1)
Related Publication 20200105551A1 · Apr 2, 2020