IP Library Granted Patent US 10,658,587
Granted Patent B2
US 10,658,587 · App. 16/169,372 · Granted May 19, 2020

CEM switching device

Inventors: Kimberly Gay Reid (Austin, TX); Lucian Shifren (San Jose, CA); Carlos Alberto Paz de Araujo (Colorado Springs, CO); Jolanta Bozena Celinska (Colorado Springs, CO)
Assignee: Arm Limited
H01L45/146G11C13/0007H01L45/04H01L45/1233H01L45/1608H01L45/1616H01L45/1625H01L45/1641
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Quick Facts
Patent No.
US 10,658,587
App. No.
16/169,372
Granted
May 19, 2020
Kind
B2
Abstract

Subject matter herein disclosed relates to a method for the manufacture of a CEM switching device providing that the CEM layer comprises a doped metal compound substantially free from metal wherein ions of the same metal element are present in different oxidation states. The method may provide a CEM layer which is born on and capable of switching with operating voltages below 2.0V.

Claims (21)

1. A method for the manufacture of a CEM switching device, which method comprises forming a conductive substrate and forming a layer of correlated electron material (CEM) on or over the conductive substrate, wherein the forming of the CEM layer comprises forming a layer of a correlated electron material comprising a doped metal compound of a d- or f-block element comprising ions of the same d- or f-block element in different oxidation states and less than 5 atom % of free d- or f-block element, the free d- or f-block element being unbound and in a zero oxidation state.

2. The method according to claim 1 , wherein the doped metal compound comprises two different ions of the same d- or f-block element.

3. The method according to claim 2 , wherein the doped metal compound comprises three different ions of the same d- or f-block element.

4. The method according to claim 1 , wherein the different ions of the same d- or f-block element have oxidation states +2 and +3.

5. The method according to claim 1 , wherein the doped metal compound is a doped nickel oxide comprising Ni 2+ and Ni 3+ ions.

6. The method according to claim 5 , wherein the doped nickel oxide is absent a peak in the X-ray photoelectron spectroscopy spectrum of the CEM layer corresponding to unbound nickel in zero oxidation state.

7. The method according to claim 1 , wherein the doped metal compound is a doped nickel oxide comprising Nit, Ni 2+ and Ni 3+ ions.

8. The method according to claim 1 , further comprising forming a conductive overlay on the CEM layer.

9. The method according to claim 1 , wherein the dopant is carbonyl ligand.

10. The method according to claim 9 , wherein the doped metal compound provides a carbon content of between 10 atom % and 20 atom % in the fully formed device.

11. A method for the manufacture of a CEM switching device, which method comprises forming a layer of correlated electron material (CEM) on a substrate and forming a conductive overlay on the CEM layer, wherein the forming of the CEM layer comprises forming a layer of a correlated electron material comprising a doped metal compound of a d- or f-block element comprising ions of the same d- or f-block element in different oxidation states and less than 5 atom % of free d- or f-block element, the free d- or f-block element being unbound and in a zero oxidation state.

12. The method according to claim 11 , wherein the doped metal compound comprises two different ions of the same d- or f-block element.

13. The method according to claim 12 , wherein the doped metal compound comprises three different ions of the same d- or f-block element.

14. The method according to claim 11 , wherein the different ions of the same d- or f-block element have oxidation states +2 and +3.

15. The method according to claim 11 , wherein the doped metal compound is a doped nickel oxide comprising Ni 2+ and Ni 3+ ions.

16. The method according to claim 15 , wherein the doped nickel oxide is absent a peak in the X-ray photoelectron spectroscopy spectrum of the CEM layer corresponding to unbound nickel in zero oxidation state.

17. The method according to claim 11 , wherein the doped metal compound is a doped nickel oxide comprising Nit, Ni 2+ and Ni 3+ ions.

18. The method according to claim 17 , wherein the doped nickel oxide is absent a peak in the X-ray photoelectron spectroscopy spectrum of the CEM layer corresponding to unbound nickel in zero oxidation state.

19. The method according to claim 11 , wherein the substrate is a conductive substrate.

20. The method according to claim 11 , wherein the dopant is carbonyl ligand.

21. The method according to claim 20 , wherein the doped metal compound provides a carbon content of between 10 atom % and 20 atom % in the fully formed device.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 26, 2020
From: ARM LIMITED
To: CERFE LABS, INC.
Reel/Frame 054297/0508 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 13, 2020
From: REID, KIMBERLY GAY; SHIFREN, LUCIAN; PAZ DE ARAUJO, CARLOS ALBERTO; CELINSKA, JOLANTA BOZENA
To: ARM LIMITED
Reel/Frame 052375/0357 →
Continuity (2)
Division 15260515 · Sep 9, 2016
Related Publication 20190058119A1 · Feb 21, 2019
Cited By (1)
US 12,232,436