Semiconductor device and display unit
A semiconductor device includes a substrate, a transistor, a storage capacitor, a first insulating layer, and a second insulating layer. The transistor includes a semiconductor film, a gate insulating film, a first gate electrode, and a second gate electrode. The semiconductor film, the gate insulating film, and the first gate electrode are provided in this order from the substrate. The second gate electrode faces the first gate electrode across the semiconductor film. The storage capacitor includes a lower electrode and an upper electrode that are provided in this order from the substrate. The upper electrode faces the lower electrode and includes the same material as the semiconductor film. The first insulating layer is provided between the second gate electrode and the semiconductor film. The second insulating layer is provided between the lower electrode and the upper electrode and has a smaller thickness than the first insulating layer.
1. A semiconductor device comprising:
a substrate;
a transistor including a semiconductor film, a gate insulating film, a first gate electrode, and a second gate electrode, the semiconductor film, the gate insulating film, and the first gate electrode being provided in this order from the substrate, the second gate electrode facing the first gate electrode across the semiconductor film;
a storage capacitor including a lower electrode and an upper electrode, the lower electrode and the upper electrode being provided in this order from the substrate, the upper electrode facing the lower electrode and including a material a same as a material of the semiconductor film;
a first insulating layer provided between the second gate electrode and the semiconductor film; and
a second insulating layer provided between the lower electrode and the upper electrode and having a thickness smaller than a thickness of the first insulating layer, wherein
the first insulating layer has a contact-hole, and
the transistor further includes a source-drain electrode that is electrically coupled to the semiconductor film via the contact-hole of the first insulating layer.
2. The semiconductor device according to claim 1 , wherein
the first insulating layer includes an organic insulating film and an inorganic insulating film, and
the second insulating film includes the inorganic insulating film.
3. The semiconductor device according to claim 2 , wherein
the thickness of the first insulating layer comprises a total thickness of the organic insulating film and the inorganic insulating film, and
the thickness of the second insulating layer comprises the thickness of the inorganic insulating film.
4. The semiconductor device according to claim 1 , wherein the source-drain electrode includes a material a same as a material of the second gate electrode.
5. The semiconductor device according to claim 1 , wherein the second gate electrode is held at a fixed potential.
6. The semiconductor device according to claim 1 , wherein the semiconductor film includes an oxide semiconductor material.
7. The semiconductor device according to claim 1 , wherein the first gate electrode has an end face that is aligned with an end face of the gate insulating film.
8. The semiconductor device according to claim 1 , wherein the second gate electrode has a planar shape a same as a planar shape of the first gate electrode.
9. A display unit provided with a semiconductor device and a display element layer that is configured to be driven by the semiconductor device, the semiconductor device comprising:
a substrate;
a transistor including a semiconductor film, a gate insulating film, a first gate electrode, and a second gate electrode, the semiconductor film, the gate insulating film, and the first gate electrode being provided in this order from the substrate, the second gate electrode facing the first gate electrode across the semiconductor film;
a storage capacitor including a lower electrode and an upper electrode, the lower electrode and the upper electrode being provided in this order from the substrate, the upper electrode facing the lower electrode and including a material a same as a material of the semiconductor film;
a first insulating layer provided between the second gate electrode and the semiconductor film; and
a second insulating layer provided between the lower electrode and the upper electrode and having a thickness smaller than a thickness of the first insulating layer, wherein
the first insulating layer has a contact-hole, and
the transistor further includes a source-drain electrode that is electrically coupled to the semiconductor film via the contact-hole of the first insulating layer.
10. The display unit according to claim 9 wherein the source-drain electrode includes a material a same as a material of the second gate electrode.
11. A semiconductor device comprising:
a substrate;
a transistor including a semiconductor film, a gate insulating film, a first gate electrode, a second gate electrode, and a source-drain electrode, wherein the source-drain electrode electrically coupled to the semiconductor film;
the second gate electrode facing the first gate electrode across the semiconductor film; and
the semiconductor film, the gate insulating film and the first gate electrode being provided in this order from the substrate;
a first insulating layer provided between the second gate electrode and the semiconductor film, wherein the first insulating layer has a contact-hole, and the source-drain electrode extends through the contact-hole.