IP Library Granted Patent US 10,581,224
Granted Patent B2
US 10,581,224 · App. 16/183,679 · Granted Mar 3, 2020

Feedback biased vertical cavity surface emitting laser

Inventor: Petter Westbergh (McKinney, TX)
Assignee: Finisar Corporation
H01S5/18327H01S5/0264H01S5/0425H01S5/04252H01S5/04253H01S5/04254H01S5/04256H01S5/04257H01S5/1021H01S5/1833H01S5/18302H01S5/18311H01S5/18394H01S5/2063
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Quick Facts
Patent No.
US 10,581,224
App. No.
16/183,679
Granted
Mar 3, 2020
Kind
B2
Abstract

A VCSEL may include a bottom DBR mirror and a top DBR mirror above the bottom DBR mirror. The VCSEL may include a vertical optical cavity located within a portion of the bottom and top DBR mirrors. The vertical optical cavity may be configured to emit an optical signal. The VCSEL may include a lateral feedback optical cavity located within a different portion of the bottom and the top DBR mirrors configured to receive a feedback bias signal configured to bias the lateral feedback optical cavity to adjust the optical signal. The VCSEL may include an active region formed between the bottom and the top DBR mirrors that may include an oxide layer defining an oxide aperture. The VCSEL may include an isolation implant configured to electrically isolate the vertical optical cavity from the feedback optical cavity and to create a first and a second aperture within the oxide aperture.

Claims (38)

1. A coupled cavity vertical cavity surface emitting laser (VCSEL) comprising:

a bottom distributed Bragg reflector (DBR) mirror;

a top DBR mirror formed above the bottom DBR mirror;

a vertical optical cavity located within a portion of the bottom DBR mirror and a portion of the top DBR mirror, wherein the vertical optical cavity is configured to emit an optical signal;

a lateral feedback optical cavity located within a different portion of the bottom DBR mirror and a different portion of the top DBR mirror, wherein the lateral feedback optical cavity is configured to receive a feedback bias signal to bias the lateral feedback optical cavity to adjust the optical signal;

an active region formed between the bottom DBR mirror and the top DBR mirror and comprising an oxide layer that defines an oxide aperture; and

an isolation implant formed within the top DBR mirror and configured to electrically isolate the vertical optical cavity from the lateral feedback optical cavity and to create a first aperture and a second aperture within the oxide aperture.

2. The coupled cavity VCSEL of claim 1 , wherein the isolation implant extends through the top DBR mirror and the active region at least to the bottom DBR mirror.

3. The coupled cavity VCSEL of claim 1 , further comprising a bias metal contact formed on a portion of the top DBR mirror, wherein the bias metal contact is configured to receive the feedback bias signal and provide the feedback bias signal to the lateral feedback optical cavity.

4. The coupled cavity VCSEL of claim 1 , wherein the feedback bias signal comprises a direct current (DC) signal.

5. The coupled cavity VCSEL of claim 1 , wherein the feedback bias signal comprises a forward bias signal configured to decrease absorption of light in the lateral feedback optical cavity.

6. The coupled cavity VCSEL of claim 1 , wherein the feedback bias signal comprises a reverse bias signal configured to increase absorption of light in the lateral feedback optical cavity.

7. The coupled cavity VCSEL of claim 1 , further comprising an anti-reflection layer formed above the top DBR mirror.

8. The coupled cavity VCSEL of claim 1 , wherein the oxide aperture has a width of between substantially three micrometers and substantially fifteen micrometers.

9. A method of biasing a vertical cavity surface emitting laser (VCSEL), the method comprising:

emitting light from an active region of the VCSEL;

passing a first portion of the light through an oxide aperture optically coupled to a vertical optical cavity of the VCSEL;

passing a second portion of the light into a lateral feedback optical cavity of the VCSEL; and

biasing the lateral feedback optical cavity to adjust the light emitted by the vertical optical cavity.

10. The method of claim 9 , wherein biasing the lateral feedback optical cavity to adjust the light emitted by the vertical optical cavity further comprises biasing the lateral feedback optical cavity with a DC signal.

11. The method of claim 9 , further comprising:

confining the light vertically within the oxide aperture; and

confining the light laterally within the oxide aperture.

12. The method of claim 9 , further comprising adjusting the biasing of the lateral feedback optical cavity to a target feedback strength, wherein the target feedback strength may be associated with both a target three decibel (dB) bandwidth and a target resonance peak of the light emitted by the vertical optical cavity.

13. An optical transceiver comprising:

a bottom distributed Bragg reflector (DBR) mirror;

a top DBR mirror positioned above the bottom DBR mirror;

a vertical optical cavity located within a portion of the bottom DBR mirror and a portion of the top DBR mirror, wherein the vertical optical cavity is configured to emit an optical signal;

a lateral feedback optical cavity located within a different portion of the bottom DBR mirror and a different portion of the top DBR mirror, wherein the lateral feedback optical cavity is optically coupled to the vertical optical cavity and is configured to receive a feedback bias signal configured to bias the lateral feedback optical cavity to adjust the optical signal emitted by the vertical optical cavity;

an active region between the bottom DBR mirror and the top DBR mirror comprising an oxide layer which defines an oxide aperture; and

an isolation implant configured to electrically isolate the vertical optical cavity from the lateral feedback optical cavity and create a first aperture and a second aperture within the oxide aperture.

14. The optical transceiver of claim 13 , wherein the isolation implant extends through the top DBR mirror and the active region at least to the bottom DBR mirror.

15. The optical transceiver of claim 13 , further comprising a bias metal contact proximate the lateral feedback optical cavity, wherein the bias metal contact is configured to receive the feedback bias signal and provide the feedback bias signal to the lateral feedback optical cavity.

16. The optical transceiver of claim 13 , wherein the feedback bias signal comprises a direct current (DC) signal.

17. The optical transceiver of claim 13 , wherein the feedback bias signal comprises a forward bias signal configured to decrease absorption of light in the lateral feedback optical cavity.

18. The optical transceiver of claim 13 , wherein the feedback bias signal comprises a reverse bias signal configured to increase absorption of light in the lateral feedback optical cavity.

19. The optical transceiver of claim 13 , wherein the oxide aperture has a width of between substantially three micrometers and substantially fifteen micrometers.

20. The optical transceiver of claim 13 , further comprising an anti-reflection layer proximate the top DBR mirror.

Assignments (5)
PATENT RELEASE AND REASSIGNMENT Recorded Jul 5, 2022
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: II-VI INCORPORATED; MARLOW INDUSTRIES, INC.; EPIWORKS, INC.; LIGHTSMYTH TECHNOLOGIES, INC.; KAILIGHT PHOTONICS, INC.; COADNA PHOTONICS, INC.; OPTIUM CORPORATION; FINISAR CORPORATION; II-VI OPTICAL SYSTEMS, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; II-VI DELAWARE, INC.; II-VI OPTOELECTRONIC DEVICES, INC.; PHOTOP TECHNOLOGIES, INC.
Reel/Frame 060574/0001 →
SECURITY INTEREST Recorded Jul 1, 2022
From: II-VI INCORPORATED; II-VI DELAWARE, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; PHOTOP TECHNOLOGIES, INC.; COHERENT, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 060562/0254 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 1, 2020
From: FINISAR CORPORATION
To: II-VI DELAWARE, INC.
Reel/Frame 052286/0001 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Sep 25, 2019
From: II-VI INCORPORATED; MARLOW INDUSTRIES, INC.; EPIWORKS, INC.; LIGHTSMYTH TECHNOLOGIES, INC.; KAILIGHT PHOTONICS, INC.; COADNA PHOTONICS, INC.; OPTIUM CORPORATION; FINISAR CORPORATION; II-VI OPTICAL SYSTEMS, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; II-VI DELAWARE, INC.; II-VI OPTOELECTRONIC DEVICES, INC.; PHOTOP TECHNOLOGIES, INC.
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 050484/0204 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 26, 2018
From: WESTBERGH, PETTER
To: FINISAR CORPORATION
Reel/Frame 047583/0390 →