Method of manufacturing semiconductor device by etching and washing
A method of manufacturing a semiconductor device includes forming a semiconductor film including an oxide semiconductor material, forming a gate electrode facing the semiconductor film, forming a gate insulating film between the gate electrode and the semiconductor film, the gate insulating film having a side face that is uncovered with the gate electrode; and washing the side face of the gate insulating film with use of a chemical liquid that is able to dissolve the oxide semiconductor material.
1. A method of manufacturing a semiconductor device, the method comprising:
forming a semiconductor film including an oxide semiconductor material;
etching an electrically conductive film and an insulating film to form
a gate electrode facing the semiconductor film, and
a gate insulating film between the gate electrode and the semiconductor film, the gate insulating film having a side face not covered by the gate electrode; and
after the etching, washing the side face of the gate insulating film with use of a liquid for dissolving the oxide semiconductor material.
2. The method of manufacturing the semiconductor device according to claim 1 , wherein the washing the side face of the gate insulating film is performed with use of a wet etching method.
3. The method of manufacturing the semiconductor device according to claim 1 , wherein the gate electrode and the gate insulating film are formed by forming the insulating film and the electrically conductive film in this order on the semiconductor film, and patterning the electrically conductive film and the insulating film in this order.
4. The method of manufacturing the semiconductor device according to claim 3 , wherein the electrically conductive film and the insulating film are patterned by forming a photoresist having a predetermined shape on the electrically conductive film, and forming the electrically conductive film and the insulating film into the predetermined shape with use of a dry etching method.
5. The method of manufacturing the semiconductor device according to claim 1 , further comprising forming a channel region and a low-resistance region in the semiconductor film, the channel region facing the gate electrode, the low-resistance region having electric resistance lower than that of the channel region.
6. The method of manufacturing the semiconductor device according to claim 5 , wherein the washing the side face of the gate insulating film causes reduction in a film thickness of the semiconductor film in the low-resistance region.
7. The method of manufacturing the semiconductor device according to claim 1 , wherein the oxide semiconductor material comprises indium (In).
8. The method of manufacturing the semiconductor device according to claim 1 , further comprising:
forming a photoresist having a predetermined shape on the electronically conductive film; and
removing the photoresist.
9. A method of manufacturing the semiconductor device, the method comprising:
forming a semiconductor film including an oxide semiconductor material;
forming a gate electrode facing the semiconductor film, and a gate insulating film between the gate electrode and the semiconductor film, the gate insulating film having a side face not covered by the gate electrode,
the gate electrode and the gate insulating film being formed by forming an insulating film and an electrically conductive film in this order on the semiconductor film, and patterning the electrically conductive film and the insulating film in this order, and
the electrically conductive film and the insulating film being patterned by forming a photoresist having a predetermined shape on the electrically conductive film, and forming the electrically conductive film and the insulating film into the predetermined shape with use of a dry etching method;
washing the side face of the gate insulating film with use of a chemical liquid for dissolving the oxide semiconductor material; and
removing the photoresist, wherein
the removing the photoresist and the washing the side face of the gate insulating film are performed in a same process.
10. A method of manufacturing the semiconductor device, the method comprising:
forming a semiconductor film including an oxide semiconductor material;
forming a gate electrode facing the semiconductor film;
forming a gate insulating film between the gate electrode and the semiconductor film, the gate insulating film having a side face not covered by the gate electrode; and
washing the side face of the gate insulating film with use of a chemical liquid for dissolving the oxide semiconductor material,
wherein the chemical liquid comprises monoethanolamine.