IP Library Granted Patent US 10,854,814
Granted Patent B2
US 10,854,814 · App. 16/195,779 · Granted Dec 1, 2020

Correlated electron material devices using dopant species diffused from nearby structures

Inventors: Kimberly Gay Reid (Austin, TX); Lucian Shifren (San Jose, CA)
Assignee: Arm Limited
H01L49/003H01L45/04H01L45/1233H01L45/146H01L45/16H01L45/1658
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Quick Facts
Patent No.
US 10,854,814
App. No.
16/195,779
Granted
Dec 1, 2020
Kind
B2
Abstract

Subject matter disclosed herein may relate to fabrication of correlated electron materials used, for example, to perform a switching function. In embodiments, a correlated electron material may be doped using dopant species derived from one or more precursors utilized to fabricate nearby structures such as, for example, a conductive substrate or a conductive overlay.

Claims (21)

1. A switching device, comprising:

an electrode to comprise at least one layer of electrically conductive material to include a particular dopant species; and

a correlated electron switch to comprise at least one layer of correlated electron material formed over the electrode, wherein the correlated electron material to comprise the particular dopant species, and wherein the correlated electron material to comprise an electron back-donating material.

2. The switching device of claim 1 , wherein the particular dopant species to operate to fill oxygen vacancies in the electron back-donating material.

3. The switching device of claim 1 , wherein a concentration of the electron back-donating material to comprise an atomic concentration of between 0.1% and 10.0%.

4. The switching device of claim 1 , wherein the correlated electron material to comprise nickel oxide.

5. The switching device of claim 4 , wherein the electrically conductive material to comprise titanium nitride, tantalum nitride or tungsten nitride, or any combination thereof.

6. The switching device of claim 1 , wherein the particular dopant species to comprise carbon, chlorine, nitrogen, fluorine, cyanide (CN), nitrosyl (NO), ammonia (NH3), oxynitride molecules (NxOy, wherein x and y comprise whole numbers and wherein x>0 and y>0) or molecules of the form CxHyNz (wherein x>0, y>0, z>0), or any combination thereof.

7. The switching device of claim 1 , wherein the correlated electron material further to comprise an additional dopant species, wherein the electrically conductive material to further comprise the additional dopant species.

8. A switching device, comprising:

an electrically conductive substrate;

a correlated electron material deposited over the electrically conductive substrate; and

an electrically conductive overlay deposited over the correlated electron material, wherein the correlated electron material to comprise a particular dopant species, wherein the correlated electron material to comprise an electron back-donating material, and wherein the electrically conductive substrate or the electrically conductive overlay, or a combination thereof, to comprise the particular dopant species.

9. The switching device of claim 8 , wherein the particular dopant species to comprise nitrogen, chlorine or carbon, or any combination thereof.

10. The switching device of claim 8 , wherein the particular dopant species to operate to fill oxygen vacancies in the correlated electron material.

11. The switching device of claim 8 , wherein the electrically conductive substrate to comprise titanium nitride, tantalum nitride or tungsten nitride, or any combination thereof.

12. The switching device of claim 8 , wherein the correlated electron material to comprise nickel oxide.

13. The switching device of claim 8 , wherein the correlated electron material to comprise a concentration of the electron back-donating material having an atomic concentration of between 0.1% and 10.0%.

14. The switching device of claim 8 , wherein the electrically conductive overlay to comprise titanium nitride, tantalum nitride or tungsten nitride, or any combination thereof.

15. The switching device of claim 8 , wherein the particular dopant species to comprise carbon, chlorine, nitrogen, fluorine, cyanide (CN), nitrosyl (NO), ammonia (NH3), oxynitride molecules (NxOy, wherein x and y comprise whole numbers and wherein x>0 and y>0) or molecules of the form CxHyNz (wherein x>0, y>0, z>0), or any combination thereof.

16. The switching device of claim 8 , wherein the correlated electron material further to comprise an additional dopant species, wherein the electrically conductive substrate or the electrically conductive overlay, or a combination thereof, further to comprise the additional dopant species.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 26, 2020
From: ARM LIMITED
To: CERFE LABS, INC.
Reel/Frame 054297/0508 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2019
From: REID, KIMBERLY GAY; SHIFREN, LUCIAN
To: ARM LIMITED
Reel/Frame 048066/0550 →
Continuity (2)
Division 15201932 · Jul 5, 2016
Related Publication 20190088876A1 · Mar 21, 2019