Multi-zone pedestal heater without vias
A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.
1. A support pedestal comprising:
a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones,
wherein the top resistive layer and the bottom resistive layer are disposed on different planes and are not electrically interconnected to each other with vias extending through the substrate, each zone of the first and second sets of zones is independently controllable, and is coupled to at least two electric terminals from among a plurality of electric terminals configured to supply power to the first and second sets of zones, and a total number of electric terminals is less than or equal to a total of the first and second sets of zones, and
wherein all of the plurality of electric terminals are disposed at a central region of the substrate, at least one of the first and second sets of zones being connected to said at least one of the plurality of electric terminals at the central region.
2. The support pedestal of claim 1 , wherein the plurality of electric terminals are termination pads.
3. The support pedestal of claim 1 , wherein at least two zones among the at least one of the first set of zones and the second set of zones are connected to the at least one of the plurality of electric terminals.
4. The support pedestal of claim 1 , wherein the support pedestal does not include any routing layers.
5. The support pedestal of claim 1 , wherein at least one of the top resistive layer and the bottom resistive layer has one or more of a two-wire heater configuration, a matrix wiring configuration for connecting the at least one of the top resistive layer and the bottom resistive layer to an external power source, and a multi-parallel wiring configuration for connecting the at least one of the top resistive layer and the bottom resistive layer to an external power source.
6. The support pedestal of claim 1 further comprising a control system including a plurality of power converters for adjusting power to each zone of the first and second set of zones of the top and bottom resistive layers.
7. A support pedestal comprising:
a substrate having a first surface and a second surface opposite the first surface;
a top resistive layer disposed on the first surface of the substrate and defining a first set of zones;
a bottom resistive layer disposed on the second surface of the substrate and defining a second set of zones, wherein the top resistive layer and the bottom resistive layer are not electrically interconnected to each other with vias extending through the substrate; and
a plurality of electric terminals,
wherein each zone of the first and second sets of zones is independently controllable and coupled to at least two electric terminals from among the plurality of electric terminals configured to supply power to the first and second sets of zones, and a number of electric terminals is less than or equal to a total of the first and second sets of zones, and
wherein all of the plurality of electric terminals are disposed at a central region of the substrate, at least one of the first and second sets of zones being connected to said at least one of the plurality of electric terminals at the central region.
8. The support pedestal of claim 7 , wherein the support pedestal does not include any routing layers.
9. The support pedestal of claim 7 , wherein at least two zones among the at least one of the first set of zones and the second set of zones are connected to a same electric terminal among the plurality of electric terminals.
10. The support pedestal of claim 7 , wherein at least one of the top resistive layer and the bottom resistive layer has one or more of a two-wire heater configuration, a matrix wiring configuration for connecting the at least one of the top resistive layer and the bottom resistive layer to an external power source, and a multi-parallel wiring configuration for connecting the at least one of the top resistive layer and the bottom resistive layer to an external power source.
11. The support pedestal of claim 7 further comprising a control system including a plurality of power converters for adjusting power to each zone of the first and second set of zones of the top and bottom resistive layers.
12. A support member comprising:
a top resistive layer having at least two zones;
a bottom resistive layer disposed in a different plane than that of the top resistive layer, the bottom resistive layer having at least two zones;
a main substrate disposed between the top and bottom resistive layers, wherein the top resistive layer and the bottom resistive layer are not electrically interconnected to each other with vias extending through the substrate; and
a plurality of electric terminals configured to supply power to the at least two zones of the top resistive layer and the at least two zones of the bottom resistive layer, wherein at least two electric terminals from among the plurality of electric terminals are disposed on the same plane as at least one of the top resistive layer and the bottom resistive layer,
wherein each zone of the top and bottom resistive layer is coupled to at least two electric terminals from among the plurality of electric terminals and a number of the electric terminals is less than or equal to a total number of the zones of the top and bottom resistive layers, and
wherein all of the plurality of electric terminals are disposed at a central region of the support member, at least one of the first and second sets of zones being connected to said at least one of the plurality of electric terminals at the central region.
13. The support member of claim 12 , wherein the support member does not include any routing layers.
14. The support member of claim 12 , wherein at least one of the top resistive layer and the bottom resistive layer has one or more of a two-wire heater configuration, a matrix wiring configuration for connecting the at least one of the top resistive layer and the bottom resistive layer to an external power source, and a multi-parallel wiring configuration for connecting the at least one of the top resistive layer and the bottom resistive layer to an external power source.