Ultrasonic transducers in complementary metal oxide semiconductor (CMOS) wafers and related apparatus and methods
Micromachined ultrasonic transducers formed in complementary metal oxide semiconductor (CMOS) wafers are described, as are methods of fabricating such devices. A metallization layer of a CMOS wafer may be removed by sacrificial release to create a cavity of an ultrasonic transducer. Remaining layers may form a membrane of the ultrasonic transducer.
1. An ultrasound device, comprising:
a complementary metal oxide semiconductor (CMOS) wafer comprising:
an integrated circuit having a transistor gate layer;
a plurality of metallization layers disposed above the transistor gate layer; and
an ultrasonic transducer formed in the plurality of metallization layers above the transistor gate layer, the ultrasonic transducer comprising:
a bottom electrode formed above a first of the plurality of metallization layers;
a cavity disposed above the bottom electrode; and
a top electrode disposed above the cavity and formed below a second of the plurality of metallization layers;
wherein the top electrode comprises a plurality of vias disposed between the cavity and the second of the plurality of metallization layers.
2. The ultrasound device of claim 1 , wherein the plurality of vias are spaced relative to each other by between approximately 0.1 microns and approximately 0.5 microns.
3. The ultrasound device of claim 1 , wherein the plurality of vias are spaced relative to each other by between approximately 0.2 microns and approximately 0.3 microns.
4. The ultrasound device of claim 1 , wherein the plurality of vias are each approximately 0.2 microns×0.2 microns in cross-section.
5. The ultrasound device of claim 1 , wherein the plurality of vias are each approximately 0.3 microns×0.3 microns in cross-section.
6. The ultrasound device of claim 1 , further comprising a third and a fourth of the plurality of metallization layers disposed between the first of the plurality of metallization layers and the transistor gate layer.
7. The ultrasound device of claim 1 , wherein the integrated circuit is disposed directly beneath the ultrasonic transducer.
8. The ultrasound device of claim 1 , wherein the second of the plurality of metallization layers is a topmost metallization layer of the plurality of metallization layers, and no metallization layers are disposed between the cavity and the second of the plurality of metallization layers.
9. The ultrasound device of claim 1 , wherein the ultrasonic transducer further comprises an acoustic membrane that includes the top electrode and the second of the plurality of metallization layers.
10. The ultrasound device of claim 9 , wherein the acoustic membrane further comprises a dielectric layer in which the second of the plurality of metallization layers is disposed.
11. The ultrasound device of claim 9 , wherein the acoustic membrane further comprises:
a first passivation layer disposed over the second of the plurality of metallization layers; and
a second passivation layer disposed over the first passivation layer, the second passivation layer sealing access holes to the cavity.
12. The ultrasound device of claim 1 , wherein the cavity comprises a void of a third of the plurality of metallization layers.
13. The ultrasound device of claim 12 , wherein the ultrasonic transducer further comprises an acoustic membrane that includes:
the top electrode;
the second of the plurality of metallization layers;
a first dielectric layer in which the third of the plurality of metallization layers is disposed; and
a second dielectric layer in which the second of the plurality of metallization layers is disposed.
14. The ultrasound device of claim 1 , wherein the plurality of metallization layers are configured as CMOS metallization layers for signal routing.
15. The ultrasound device of claim 1 , further comprising sealed access holes to the cavity.
16. The ultrasound device of claim 12 , wherein the sealed access holes are formed around a perimeter of the cavity and the plurality of metallization layers run between the sealed access holes.
17. An ultrasound device, comprising:
a complementary metal oxide semiconductor (CMOS) wafer comprising:
an integrated circuit having a transistor gate layer;
a plurality of metallization layers disposed above the transistor gate layer; and
an ultrasonic transducer formed in the plurality of metallization layers above the transistor gate layer, the ultrasonic transducer comprising:
a bottom electrode formed above a first of the plurality of metallization layers; and
a cavity disposed above the bottom electrode;
wherein the bottom electrode comprises a plurality of vias disposed between the first of the plurality of metallization layers and the cavity.
18. The ultrasound device of claim 17 , wherein the plurality of metallization layers are configured as CMOS metallization layers for signal routing.
19. The ultrasound device of claim 17 , further comprising a second and a third of the plurality of metallization layers disposed between the first of the plurality of metallization layers and the transistor gate layer.