Methods and processes for forming devices from correlated electron material (CEM)
Subject matter disclosed herein may relate to fabrication of correlated electron materials used, for example, to perform specified application performance parameters. In embodiments, CEM devices fabricated at a first stage of a wafer fabrication process, such as a front-end-of-line stage, may differ from CEM devices fabricated at a second stage of a wafer fabrication process, such as a middle-of-line stage or a back-end-of-line stage, for example.
1. A method of forming a plurality of correlated electron material (CEM) devices on a wafer, comprising:
forming, at a first stage of a plurality of stages of a manufacturing operation, at least a first CEM device of the plurality of CEM devices to operate at a first layer of the wafer according to a first set of particular physical dimensional parameters or compositional parameters, or a combination thereof, to implement a first performance profile for the first CEM device, wherein the plurality of stages of the manufacturing operation include a front-end-of-line stage, a middle-of-line stage, back-end-of-line stage and/or a system integration stage, or any combination thereof; and
forming, at a second stage of the plurality of stages of the manufacturing operation, at least a second CEM device of the plurality of CEM devices to operate at a second layer positioned over the first layer of the wafer, wherein the second CEM device to exhibit a performance profile different from the first performance profile for the first CEM device.
2. The method of claim 1 , wherein the second stage of the manufacturing operation comprises the middle-of-line stage of the manufacturing operation, the at least the second CEM device to operate as an interconnect.
3. The method of claim 2 , wherein the forming the at least the second CEM device comprises forming the at least the second CEM device to exhibit a resistance of less than 1.6 microohm-cm while in a lower-resistance state.
4. The method of claim 3 , wherein the forming the at least the second CEM device comprises providing a dopant during forming of the at least the second CEM device to bring about an atomic concentration of dopant within at least a portion of the at least the second CEM device of between 0.1% and 15.0%.
5. The method of claim 2 , wherein the forming the at least the second CEM device comprises forming the at least the second CEM device to exhibit a resistance of greater than 16.0 microohm-cm while in a higher-resistance state.
6. The method of claim 1 , wherein the forming the at least the first CEM device comprises forming the at least the first CEM device to operate as a logic device, and wherein the first stage of the manufacturing operation comprises the front-end-of-line stage of the manufacturing operation.
7. The method of claim 6 , wherein the logic device to exhibit a leakage current of less than 100.0 nA/micron under an applied voltage of less than 1.2 Volt.
8. The method of claim 1 , further comprising forming a spacer to fill at least a portion of a trench separating the first CEM device from a second device and/or structure positioned at the first layer.
9. The method of claim 8 , wherein the spacer to be formed to be in contact with the-first CEM device and one or more electrodes of the first CEM device.
10. The method of claim 1 , wherein the at least the second CEM device to comprise a sloped sidewall having an angle of between approximately 45.0° and 90.0°.
11. The method of claim 1 , wherein the second CEM device to comprise a through-substrate via which contacts an electrode of the first CEM device.
12. The method of claim 11 , wherein the through-substrate via to exhibit a resistance of less than 1.6 microohm-cm while in a lower-resistance state.
13. The method of claim 11 , wherein the through-substrate via to exhibit a resistance of greater than 16.0 microohm-cm while in a higher-resistance state.
14. The method of claim 1 , wherein the at least one first CEM device to comprise one or more transistors, diodes, access devices or a sensors, or any combination thereof.
15. The method of claim 1 , wherein the at least one first CEM device to comprise a memory device, and wherein the at least one CEM device to exhibit a leakage current of less than 100.0 nA/micron under an applied voltage of less than 1.2 volts.
16. The method of claim 1 , wherein the first performance profile to exhibit a current flow in the first CEM device responsive to one or more applied voltages.
17. The method of claim 1 , wherein the at least one second CEM device to comprise a routing layer, an optical interconnect or one or more elements of an antenna, or a combination thereof.